Description
STS, SPTS ASE Multiplex ICP System, RIE Etch Advanced Silicon Etcher, complete
Quantity: 1 set
Location: CA USA, SS6305W
Valid: Subject to prior sale without notice. This is only for end users. Applicate your time.
Condition: Used.
Product info for your reference:
- OEM = Surface Technology Systems Limited ,STS, SPTS
- MESC Multiplex ICP ASE
- Type :ICP RIE (Inductively Coupled Plasma, Reactive Ion Etch)
- Description of Process : ASE (Advanced Silicon Etch, Bosch Process)
- Wafer Size : 150mm
- Loader capacity : 2 wafer Carousel
- Chuck Type :Mechanical Weighted Clamp
- Process Gases:
* C4F8 = 300 SCCMS
* SF6 = 600 SCCMS
* O2 = 100 SCCMS
* AR = 100 SCCMS
* MFC’s are Millipore FC2901 Series - Turbo Pump : Leybold Mag 2000 CT
- RF Generator 1 : ENI ACG-3
- RF Generator 2 : AE RFG 3001 (Advanced Energy)
- Vacuum measurement :MKS Instruments
- Gate Valve : VAT throttling type gate valve
- Slit Valve :VAT Slit Valve
- Manuals :STS MESC Multiplex ICP Operator’s and Modular Parts Catalogue
- Vacuum Pump Loadlock : Edwards Pump E2M40
- Vacuum Pump Process Module : Edwards Pump IQDP80 w/IQMB250 Blower (Intelligent Quiet Interface)
- Support Module: STS Controller Cabinet / AC Breaker Panel
The trademarks of the equipment and parts contained in this page belonged to the Original Equipment Manufacturers.
