Description
STS / CPX Multiplex Advanced Oxide Etcher (AOE)
Quantity: 1 set
Location: FOX-SS5487-20250123
Valid: Subject to prior sale without notice. This is only for end users. Applicate your time.
Condition: Used.
Product info for your reference:
- Loadlock module, 4″
- AOE Chamber module
- LEYBOLD Mag-Lev Turbo pump: 2000 L/sec
- ICP Chamber.
The trademarks of the equipment and parts contained in this page belonged to the Original Equipment Manufacturers.
