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Semiconductor Equipment Parts

Semiconductor Equipment

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Please contact us if you are interested in the Semiconductor Equipment parts. These items are only for end users and are subject to prior sale without notice. Appreciate your time.

1 2 Ebara A70W Vacuum pump, controller, missing some parts
2 3 Aluminum Vacuum Chambers, 18″x18″x6″ with various ports and flanges
3 3 ETO HDPCVD RF Generator Rack, Source Generator, AMAT HDP
4 6 NEW Mykrolis SB110202KU Throttle valves with KF40 flage
5 6″ SEMITOOL SRD A182-60MB-0215 2800 RPM CONTROLLER, 921R-A1A Relay
6 Advanced Energy 3150110-000 RF Match, 24 VDC, 3000 Watts, 13.56MHz
7 Advanced Energy 3150110-000 RF Match, 24 VDC, 3000 Watts, 13.56MHz
8 Advanced Energy 3152603-005, E’wave Power Supply, minor handling damage
9 Advanced Energy 3155162-020 RF Match F/R A Navigator 10013-L80, 27-265661-00 RF
10 Advanced Energy AE 3150273-005, RF Match, Mercury 10013, Novellus. 417121
11 Advanced Energy Mercury 10013 Match, P/N 27-256558-00
12 AE 3155162-020 RF Match Novellus 27-268661-00 Navigator 10013-L80
13 AE 3159273-005 Mercury 10013 RF Match, Novellus 27-256558-00
14 AE Advanced Energy 3150273-005 RF match, Mercury 10013 RF MATCH, water cooled
15 Allen Bradley 5370 Configurable vision processor module 5370-CVIM2 Ser A Rev C
16 AMAT 0010-01995 Centura PK569AUHA Throttle Valve NSK Poly Missing Top Sensor
17 AMAT 0010-03002 Assy, Clamp Ring, Lower, 200mm, Pre-Clean, 0040-07962
18 AMAT 0010-03347 M WxZ 6 Inch Heater Assembly. Used, untested
19 AMAT 0010-03347 WxZ Heater Assembly, 6 inch
20 AMAT 0010-09031 CVD Robot wafer handler with AMAT 0040-09037 Robot Blade
21 AMAT 0010-09968 Heated Throttle Valve 5000 Etch, Vexta Motor PX245-02AA-C4
22 AMAT 0010-20860 Magnet Assymbeley Hollow Pole Piece
23 AMAT 0010-20860 Magnet, Endura PVD Hollow Pole Piece, 0020-20297
24 AMAT 0010-37163 HDT, DPS Chamber, Throttle valve assembely
25 AMAT 0010-76036 P5000 Mini Controller with modules, S0015301
26 AMAT 0021-10699 Pumping Part Liner, Chamber, Vacuum
27 AMAT 0040-01658 Rev.001, MFR.26002, Lid, Remote Plasma, Sinergy
28 AMAT 0040-09002, Etch Chamber
29 AMAT 0040-09002, Etch Chamber
30 AMAT 0040-09002, Etch Chamber
31 AMAT 0040-39619, Lid Clamp Slit Valve, Etch Chamber, Super E Lid
32 AMAT 0100-01132 Rev.001, VAL-001-1633-01​, PCB Assy, Chamber RF Filter
33 AMAT 0190-03150 Target Diff Bond TI w/o C’bore Durasource
34 AMAT 0190-03150 Target Diff Bond TI w/o C’bore Durasource
35 AMAT 0190-35763 Seriplex Control Bus Mux I/O Interface Board PCB Square D
36 AMAT 0200-03598 / APPLIED MATERIALS BLANK LID, PHOTOMASK TETRA II
37 AMAT 0200-05635 Tetra Ceramic Lid, photomask tetra II, 0200-05635-003
38 AMAT 0200-18062 Rev.3, Applied Ceramics 91-01017A, Dome, 14 ID HDPCVD.
39 AMAT 0240-26390 Kit, Gamma 2 W/B Chamber Extender, 194mm, 0040-23486
40 AMAT 0242-76387 Kit, Retrofit, Plastic Bearings
41 AMAT 0290-20003 DeGas Lamp Module Housing, Endura, de-gas Orienter, UD, No Lamps
42 AMAT 0550-01012, Analy RGA transceptor control computer w Inficon software PCI
43 AMAT 0660-00223, Industrial Panel PC, 15″ LCD w/ Touchscreen, Advantech.
44 AMAT 0660-00223, Industrial Panel PC, 15″ LCD w/ Touchscreen, Advantech.
45 AMAT 3870-01516 Valve Gate 8″ Series 14046 VAT Reverse, DN 63-400
46 AMAT CHAMBER P5000 CVD Chamber, Lid, End Point, Wafer & Susp Lift Assy, wfr Hoop
47 AMAT CHAMBER P5000 CVD Chamber, Lid, Wafer lift Hoop, Susp Assy,
48 AMAT HEAT EXCHANGER AMAT 0 ENDURA SYSTEM P544
49 APPLIED MATERIALS AMAT 0010-20806 EQ MAGNET ASSY, AMAT 0020-24562
50 Astex AX8200D Ozone Generator, AX8200, 208V, 20A 50/60Hz
51 Astex FI20061, FI20104, FI20099, AMAT 0920-01072, 3750-01129, Microwave
52 Asyst 4002-6633-01 Spartan EFEM SORTER, RFID, CROSSING AUTOMATION, MAPPER REV 2
53 Asyst 4002-6633-01 Spartan EFEM SORTER, RFID, CROSSING AUTOMATION, MAPPER REV 2
54 Asyst 4002-6633-01 Spartan EFEM SORTER, RFID, CROSSING AUTOMATION, WAFER MAPPER
55 Asyst 4002-6633-01 Spartan EFEM Wafer Mapper Shuttle, RFID, CROSSING AUTOMATION
56 Asyst EFEM Sorter Assy, 3200-1225-02, 1225-03-1600129​0 4002-4777-01 4002-9144-01
57 Asyst EFEM Sorter Assy, 3200-1225-02777-01964-01679-01
58 Asyst Spartan EFEM Sorter RFID reader assy 3200-1225-02519-01
59 Credence Systems 60-1049-30 Waveform Generator HSD Board, PCB, STS 3500
60 Crossing Automation Asyst 4002-6633-01 Spartan, Wafer Mapper Sorter RFID
61 CTI-Cryogenics 8116306G001 On-Board 8 Cryopump
62 ENI ACG-5-01M14 RF Generator, Power Supply, ACG-5, Novellus P61-2337
63 ENI LPG-6A Low Frequency RF Generator, LAM
64 ENI OEM12B-01 RF generator, tested, with calibration sheet
65 ENI PL-2HF-11451-55 Plasmaloc 2-HF Low Frequency RF Generator
66 ENI Power Systems LPG-6AL-21321, Low Frequency RF Generator
67 Falcon Alignment K Plate Tool, Align, K-Plate 1000-0719-01
68 IGC FI-5A Polycold Cryogenic Refrigeration Unit, R2000 Series, 940068-12
69 IMS Vanguard w/ 2 AT8000B Programmable DC System 2 HP Agilent 6651A DC P.S.
70 IPEC Speedfam Novellus 2850-739458, Robot 676
71 iselRobotik vacuum robot, isel Robotik 10-21-0027-7000​0-T002,
72 Kepco 26248 PVD Power Supply, Novellus 27-272441-00
73 Kepco 26248 PVD Power Supply, Novellus 27-272441-00
74 Kepco 26248 PVD Power Supply, Novellus 27-272441-00
75 Kepco 26248 PVD Power Supply, Novellus 27-272441-00
76 Kepco 26248 PVD Power Supply, Novellus 27-272441-00
77 Kulicke & Soffa 1488 Plus Automatic Wire Bonders
78 MeiVac VQ-200-ISO-U-SM​, Vari-Q Throttle Valve
79 MeiVac VQ-200-ISO-U-SM​, Vari-Q Throttle Valve
80 MKS PBTS1A01UB2 Portable Pressure Tester, Type 670BD21, w/ Baratron
81 NEW AMAT 0010-18202 HDP-CVD Chamber Upper Chamber
82 NEW VAT 0200-X-AE24 Rectangle gate valve 0200X-AE24-1014​/0028
83 NEW VAT 16246-PA21-ADK1​/0003 Pendulum VALVE 16246-PA21
84 New York Blower E05517 100 ACF SW Fan Class 3 ARR-4 w/ JVA254TTFNA6515​BAL
85 Nikon 45007-837AN Interface Control Board, PCB837, AF-PSDXB
86 Novellus circuit breaker panel LPB, WTS HV 02-158824-00 B w Cosel power supplies
87 Pfeiffer turbo pump TMH 064 and controller TCP 015 DN63 ISO-k 1p Working
88 Semitool 900T0293-01 Preclean / Etch w/ Remote 5 Axis w/ 4 Yaskawa SGDH-01AE
89 Semitool, 1-Phase, SRD, Spinner Rinser Dryer6296
90 SMC HRZ010-WS-C Thermo Chiller
91 Thermo Neslab HX+300W/C Recirculating Chiller, HX300
92 Trazar AMU10E-2, RF match for Novellus 27-118072, looks very clean/rebuilt
93 Trazar Corporation M/N AMU10H-1, P/N 553-07491 00
94 VAT 02009-BE24-0001 Rectangular Gate Valve, PM, ISO, F02-60492/0023
95 VAT 65146-PAHC-AQF1​/0001 Pendulum VALVE 65146-PAHC
96 Working MKS ENI DCG-100 DC sputtering power supply. Master

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