Novellus / Lam Concept Two Speed NExT CVD 8

Description

New Novellus / Lam Concept Two Speed NExT CVD 8″

– Wafer Shape: Notch
– SMIF Interface: Yes
– Cassette Loader: LPI 2200
– Loadlock Indexer Robot: Indexer II
– PEC slot: MPS with one cool station
– Main power distributer: PDP
– System Main Power: 3￠5Wires 208V
– System UPS Power: Yes
– Loadlock Baratron Model: MKS
– Split Insert: Yes
– Slit Valve Type: SMC L-Motion
– TM Turbo Pump Model: Pfeiffer TC 400 E74
– TM Throttle Valve Model: MKS
– TM Baratron Model: MKS
– IOC Version: V 4.4
– TM Robot Type: Mag 7 with Center Finder
– TMRobot Blade: Metal
– Wafer sensor: Existence
– EMO’s: Push Button/turn to release
– Front Monitor: 15 inch
– Software Revision: 5.502 B26
– Signal Tower: Yes
– Module Controller: MC4X
– Host Interface: SECS / GEM
DLCM Gas MFC:
– MFC1 Ar/He: 1000sccm Ar / Brooks 5866
– MFC2 Ar/He: 1000sccm Ar / Brooks 5866
– MFC3 Ar/He: 500sccm Ar / Brooks GF120C
Process Module configuration:
– Chamber Type Nanofill
– Chamber Process IMD + Multistep
– Process Clean Type RPC
– Dome Type High Power Dome with Multi Frequency
– ESC Type: Duratek mc Notch 6 Pin
– Nanofill：High Purity ESC Guard Ring: Notch
– Module Controller: MC4X
– Module Turbo Pump: Adixen ATP 2300M
– Manometer 1(10T): MKS
– Throttle Valve: MKS
– Temp Monitoring: NTM Delta with ATC: ATC option
– Manometer 2(20T): MKS
– HF Generator: AE Paramount 6013
– MF Generator: AE Paramount 5KW
– LF Generator: AE Paramount 5KW
– RF Match: AE MERCURY 3013
– Manometer 3(100m): MKS
– IOC Version: V 4.21
– End Point Detector: OES EPD: Verity SD2048XL-T
– Heat Exchanger Type: SMC
– Dual Clean Injector Kit: RPC with one nozzle
– 2022 Vintage