Description
New New Non-Contact Sheet Resistance Measurement System. Originated from KLA-Tencor Instruments M-Gage™ 300
Equipment info for your reference only:
The New Non-Contact Sheet Resistance Measurement System measures sheet resistance in ohms per square or milliohms per square. The System can accommodate 200mm (8”) wafers as well as the standard 5″ and 6″ wafers.
Key Features:
- 30 years proven Eddy Sheet Resistance Measurement technologies.
- Non-contact Sheet Resistance Measurement technologies.
- 1mΩ/square to 19,990 Ω/square measurement range capability
- Touch Screen Monitor and PC w/ Advanced PC control software.
- Wafer carriage travel programmed with internal encoder step motor , without encoder disk.
- Consistent wafer-to-wafer process cycle repeatability.
- Small footprint and energy efficiency.
- Made in U.S.A.
Specifications:
- Test Sights: Single center-point, 5-point, or 9-point.5-9
- Highly Conductive or Metal Sheet Resistance:
- 1 to 1,999 mΩ/square
- 1 to 1,999 Ω/square
- Or 10 to 19,990 Ω/square
- Highly Conductive or Metal Film Thickness Minimum: 100 ÅngströmMaximum: Proportional to resistivity. Maximum for a resistivity of 2.7 mW-cm is 270 kÅ (27 mm)
Sheet Resistance Repeatability Total repeatability is the standard deviation (s) percent of mean value(X),1 count.
| Range | s/X (±%) |
| 1 to 100 mΩ/sq,Ω/sq | 1 |
| 100 to 500 mΩ/sq,Ω/sq | 2 |
| 500 to 1000 mΩ/sq,Ω/sq | 4 |
| 1000 to 1,999 mΩ/sq,Ω/sq | 6 |
| 1,999 to 5,000 Ω/sq | Consult Factory |
| 5000 to 10,000 Ω/sq | Consult Factory |
| 10,000 to 15,000 Ω/sq | Consult Factory |
Configuration:
- Main Frame
- Wafer Carriage (2”-6”)
- Measurement Head
- RF Tank Circuit board
- Pentium® class computer board with OEM proprietary software package
- Main control board
- Motor control board.
- Two USB Ports
- Two Extra DB9 Ports
- 15–inch touch screen GUI
- Mouse & Keyboard
- USB Flash Drive with AW Software backup.
Facilities:
- Place the instrument on a hard surface. Do not operate it on a cushioned surface
- The room temperature should be close to 23° C for the greatest measurement accuracy.
- Avoid environments with high concentrations of particulates, especially abrasives such as glass and silicon dust.
- Power : 50/60Hz, Single Phase, 110/220VAC, 2 Amps
- Weight and Dimensions: 44 LBs ; 11 inch (W) X 18 inch (D) X 22 inch
All the used equipment trademarks belongs to the O.E.M. , the original equipment manufacturer. All rights reserved.
MSP-32500
