Description
MRL Industries Bandit 218 LPCVD Furnace
Condition: Used
Valid Term: These are subject to prior sale. These are only for end user. Appreciate your time.
Location: CA, USA-SS7270W
Info for your reference. Contact us for more info.
- 200mm LPCVD furnace
- tube 1: TEOS/anneal
- tube 2:Nitride/poly, gas connections: air low N2, N2, FG1, Ar, O2, SiH2Cl2(DCS), SiH4, NH3
- 2 Kashiyama vacuum pumps with blowers
- Schumacher M-Dot dopant source controller
- furnace dims: 66x36x78
- gas module dims: 18x36x78
- power req: 480v, 250amps max
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