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2016

Matrix Spare Parts

Please contact us for the Matrix Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.

Category: Parts

Description

Description

Please contact us for the Matrix Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.

OEM	OEM#	Description
Matrix	95-16564	150 VALVE ASSEMBLY
Matrix	992-40281	ELECTRODE, SLOTTED UPPER
Matrix	992-40306	SLOTTED ELECT. W/FLAME UPPER
Matrix	992-40410	ELECTRODE SLOTTED LASER POINT
Matrix	992-60073	CERAMIC SPACER
Matrix	992-60101	QUARTZ CHAMBER
Matrix	992-60110	QUARTZ CHAMBER
Matrix	992-60137	WAFER LIFT PIN
Matrix	992-60147	QUARTZ CHAMBER
Matrix	992-60148	PLATE, QUARTZ BAFFLE
Matrix	992-60207	QUARTZ CHAMBER 8″
Matrix	992-60239	RING, QUARTZ IBM
Matrix	992-60253	PLATE, QUARTZ BAFFLE 10.5″
Matrix	992-60294	REACTOR, QUARTZ MICROWAVE
Matrix	992-60309	QUARTZ BAFFLE
Matrix	992-60310	QUARTZ BAFFLE
Matrix	992-60335	TUBE, SHORT GAS INLET, MICROWAVE
Matrix	992-60417	QUARTZ BAFFLE (60 HOLE)
Matrix	992-60419	QUARTZ BAFFLE
Matrix	992-60425	RING, CHUCK CERAMIC
Matrix	992-60426	RING, VACUUM, BAFFLE CERAMIC
Matrix	992-60427	INSULATOR, CHUCK CERAMIC
Matrix	992-60439	PLATE, QUARTZ BAFFLE
Matrix	992-60444	REACTOR, QTZ, MICROWAVE
Matrix	992-70051	ELECTRODE, POSITIVE
Matrix	992-70275	CHAMBER GRID
Matrix	992-70276	GRID, UPPER
Matrix	992-70348	ELECTRODE
Matrix	994-60050	SEAL CHUCK

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