Description
Please contact us for the Matrix Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.
| OEM | OEM# | Description |
| Matrix | 95-16564 | 150 VALVE ASSEMBLY |
| Matrix | 992-40281 | ELECTRODE, SLOTTED UPPER |
| Matrix | 992-40306 | SLOTTED ELECT. W/FLAME UPPER |
| Matrix | 992-40410 | ELECTRODE SLOTTED LASER POINT |
| Matrix | 992-60073 | CERAMIC SPACER |
| Matrix | 992-60101 | QUARTZ CHAMBER |
| Matrix | 992-60110 | QUARTZ CHAMBER |
| Matrix | 992-60137 | WAFER LIFT PIN |
| Matrix | 992-60147 | QUARTZ CHAMBER |
| Matrix | 992-60148 | PLATE, QUARTZ BAFFLE |
| Matrix | 992-60207 | QUARTZ CHAMBER 8″ |
| Matrix | 992-60239 | RING, QUARTZ IBM |
| Matrix | 992-60253 | PLATE, QUARTZ BAFFLE 10.5″ |
| Matrix | 992-60294 | REACTOR, QUARTZ MICROWAVE |
| Matrix | 992-60309 | QUARTZ BAFFLE |
| Matrix | 992-60310 | QUARTZ BAFFLE |
| Matrix | 992-60335 | TUBE, SHORT GAS INLET, MICROWAVE |
| Matrix | 992-60417 | QUARTZ BAFFLE (60 HOLE) |
| Matrix | 992-60419 | QUARTZ BAFFLE |
| Matrix | 992-60425 | RING, CHUCK CERAMIC |
| Matrix | 992-60426 | RING, VACUUM, BAFFLE CERAMIC |
| Matrix | 992-60427 | INSULATOR, CHUCK CERAMIC |
| Matrix | 992-60439 | PLATE, QUARTZ BAFFLE |
| Matrix | 992-60444 | REACTOR, QTZ, MICROWAVE |
| Matrix | 992-70051 | ELECTRODE, POSITIVE |
| Matrix | 992-70275 | CHAMBER GRID |
| Matrix | 992-70276 | GRID, UPPER |
| Matrix | 992-70348 | ELECTRODE |
| Matrix | 994-60050 | SEAL CHUCK |
