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Matrix Bobcat 209S Asher

Matrix Bobcat 209S Asher

Matrix Bobcat 209S

Model: Matrix Bobcat 209S semiconductor process equipment

Category: Plasma Asher Plasma Descum

Original Equipment Manufacturer: Matrix Integrated Systems, Inc

Condition: Refurbished by seller

Wafer Size: 8 inch configuration.

Valid Time: Subject to prior sale

Lead Time: 12 weeks

Location: Silicon Valley, CA, U.S.A.

Category: Asher Tag: Matrix

Description

Description

Model: Matrix Bobcat 209S Microwave Plasma Asher semiconductor process equipment

Category: Plasma Asher Plasma Descum

Original Equipment Manufacturer: Matrix Integrated Systems, Inc

Condition: Refurbished by seller

Vintage: 2001

S/N: 10235

Wafer Size: 8 inch configuration.

Valid Time: Subject to prior sale

Lead Time: 12 weeks

Location: Silicon Valley, CA, U.S.A.

Warranty: 12 months non-consumable parts.

Installation and training: Available at extra charge

Service Contract: Available at extra charge

Matrix Bobcat 209S plasma Asher Plasma descum semiconductor equipment General Description


Asher Component	Details
Mainframe
Type	Standalone
Model	Bobcat 209S
Chambers
How Many?	1
Type	RIE
Process (e.g., Ash, Clean, Light Etch)	Photo Resist, SU8 strip
Load Locks/Load Plate
Open Cassette or SMIF	Open Cassette
How Many?	1
Robots
How Many?	1
Method of Transport	Transfer Unit
Make/Models	Rorze RR701
RF Generators
How Many?	2
Make/Models	Comdel FP3111R2 600 W, Microwave generator 3000W
Gas Box
Gases used per chamber	3
Idenfity gases	O2, N2, None
MFC’s used (Make/Model)	MKS 1000sccm, 300sccm, 1000sccm
Control System
PC or Control Rack?	PC
Software Type and Version	Windows NT

All the Matrix Bobcat 209S Plasma Asher Plasma Descum semiconductor process equipment trademarks belongs to Matrix Integrated Systems, Inc, the original equipment manufacturer. All rights reserved.

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