Description
Model: LAM RESEARCH CORPORATION TCP 9600SEII
Quantity: 1 set
Location: FOX-SS7464-20250113
Valid: Subject to prior sale without notice. This is only for end users. Applicate your time.
Condition: Used. It was working before the end of 2024. We sell it at AS IS WHERE IS.
Equipment info for your reference.
- Process: Metal etch
- Wafer size: 6”
- Wafer type: FLAT
- Valve type: VAT pendulum valve 65 series
- ESC (Ceramic): Coated aluminum ESC – LAM
- Monochromator Endpoint: Dual endpoint detector – LAM
- Software: E2.0.1-044
- RF: 3x on board Trumpf generators (Top, bias, DSQ)
- Iso module: DSQ module
- Gas and process configuration for Chamber (1);DSQ Strip Chamber
- Robot type: Harmonic drive
- Loader type: Hine indexers 38A
- Loadlock
- Turbo pumps: Alcatel ATH1300MT
- Controllers:
Adixen Magpower (Turbo pump)
12 CH Anafaze temp controller
AC2 controller (throttle valve)
VAT PM7 controller (VAT pendulum valve)
Manual WVDS controller - Gas box
- AC Rack
The trademarks of the equipment and parts contained in this page belonged to the Original Equipment Manufacturers.
MSP-425
