Description
Chemical Vapor Deposition, chemical vapor deposition
We offer the turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for LAM (Novellus) CVD systems.
- Platform: Concept 1 / Concept 2
- Chamber: Vector / Sequel express / Sequel / Speed / Altus
- Application: HDPCVD / PECVD / WCVD
- Wafer size: 300mm / 200mm
Valid: These are only for end users in USA and Canada. They are subject to prior sale without notice.
The trademarks of the equipment and parts contained in this page belonged to the Original Equipment Manufacturers.
SS6479
