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Tel Chamber Parts

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Pls tell us PN, Description ,Quantity, and photos if possible. We will provide quotation accordingly. Appreciate your time. These are only for end users.

Our partner in USA is a leading supplier of second source parts for Etch and CVD wafer-processing machines. The company manufactures high-tolerance parts to meet the needs of the semiconductor industry, and is a major supplier of parts to leading FABs in USA.

System-Model OEM-Part-Number Part-Description OEM
Unity 85 1D10-100854-15 DRM2 BAFFLE PLATE TEL
Unity 85 1D10-101398-11 BAFFLE PLATE TEL
Unity 85 1D10-101475-11. BAFFLE PLATE TEL
Unity 85 1D10-101551-11 BAFFLE PLATE TEL
Unity 85 1D10-102848-13 BAFFLE PLATE Y203 TEL
Unity 85 1D10-200734-14 COVER BELLOW TEL
Unity 85 1D10-202177-12 UPPER ELECTRODE, VESPEL INSERT TEL
Unity 85 1D10-201429-15 UPPER ELECTRODE TEL
Unity 85 1D10-201588-12 UPPER ELECTRODE W/MONITOR TEL
Unity 85 1D10-202204-12 UPPER ELECTRODE, VESPEL INSERT, W/MONITOR TEL
Unity 85 1D10-202988-11 DRM2 COVER BELLOW TEL
Unity 85 1D10-204418-12 BELLOW COVER Y203 TEL
Unity 85 1D10-204419-12 BELLOW COVER Y203 TEL
Unity 85 1D10-204338-13 UPPER ELECTRODE Y203 TEL
Unity 85 1D10-303124-21 DRM2 DEPO SHIELD TEL
Unity 85 1D10-309697-11 DEPO WINDOW TEL
Unity 85 1D10-315183-15 DEPO SHIELD Y203 TEL

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