Description
Karl Suss MA 8/BA 8 Gen 5S Compact Mask Aligner
- For imprint processing
- Power supply: 3x 400V AC + N + PE / 50-60Hz
- Max fuse rating machine: 30amp
- Max fuse rating facility: 40amp
- Connection cable: 5x AWG8 length 16ft / 5m open end, no connector
- Vacuum: <-80 kPa
- Outer tube diameter: 6mm
- Max length: 2m
- Clean Dry Air (CDA): 0,5 to 0,8 MPa
- According to purity level ISO 8573-1:2010, [5:6:4]
- Outer tube diameter: 6mm
- CDA Consumption: ca. 1 m3/h (LH350)
- Nitrogen (N2): 0,2 to 0,5 MPa
- Outer tube diameter: 6mm
- Voltage/Frequency: 200-240 V, L1/N/PE, or L1/L2/PE, 50/60hz
- AIC or main interrupt and breakers: 15 kA IEC
- SCCR (Short Circuit Current Rating) of overall equipment: 5 kA
- Apparent Power: ca. 1,7 kVA max, inc. CIC1200 and 350 W lamp; ca. 1,0 kVA max, Bond Aligner without lamp
- Power Cable: KABEL OELFLEX 491P BK 3 G2.5
- RU AWM CSA Cable length = 3 m
- Power Plug: G146853 European Schuko Plug 16A/250V CEE7/7
Quantity: 1 set
Location: FOX-DD5816-20250122
Valid: Subject to prior sale without notice. This is only for end users. Applicate your time.
Condition: Used.
Product info for your reference:
Carl Zeiss AIMS 193 Mask Qualification System w/Coherent LDU ESI 500Hz FT 193nm, KL2500 LCD Microscope Standard Illumination System, Tui Laser ExciStar S-Industrial V2, Halcyonics Control Unit, Photometrics Quantix KAF1400-G1-M, A97J6002, Marzhauser Wetzlar GmbH & Co. KG SCAN 260×240 MSM, 90-24-009-0000, CCD Video Module XC-73CE. Tui Laser MCB500.
The trademarks of the equipment and parts contained in this page belonged to the Original Equipment Manufacturers.
