Description
OEM Quartz Tubes and Quartz Trays for AG Associates Heatpulse RTP Systems:
High-quality quartz components are essential to ensure optimal thermal uniformity, repeatability, and system longevity in AG Associates Heatpulse Rapid Thermal Processors (RTPs). We provide OEM-grade quartz tubes and quartz trays specifically engineered for models including:
Heatpulse 210, 310, 410, 610, 4100, 4100S, 4108, 8008, 8108, and 8800.
Substituting these parts with low-grade or second-source quartz components can cause thermal distortion, inconsistent wafer processing, and premature system wear. Our quartz products are manufactured to meet the original specifications for:
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Precise dimensional tolerances
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High purity quartz (low contamination)
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Superior thermal shock resistance
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Excellent optical and chemical stability under high-temperature RTP conditions
With over 25 years of experience supplying the semiconductor industry, we are a trusted source for genuine quartz tubes and trays that maintain the integrity and performance of your RTP equipment.
We also offer custom quartz tube and tray fabrication for specialized or non-standard RTP applications.
Contact us today for:
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OEM quartz tubes for AG Heatpulse RTP
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OEM quartz trays for AG Heatpulse RTP
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Custom quartz solutions for RTP systems
Ensure your Rapid Thermal Processing equipment runs at peak performance — trust only proven quartz components.
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| Item No. | Part Number | Description |
| 1 | 7100-1844-01D | Tray 8″ Removable Pins |
| 2 | 7100-4033-01B | Tray 8″ Removable Pins DTC |
| 3 | 7100-5727-01D | Assembly Tray 8″ Removable Pins |
| 4 | 7100-5730-01B | Assembly Tray 6″ Removable Pins |
| 5 | 7100-5897-01A | Assembly Tray 6″ Removable Pins EZ-DTC |
| 6 | 7100-5898-01A | Assembly Tray 8″ Removable Pins EZ-DTC |
| 7 | 7100-5993-02B | Assembly Tray 8″ Ceramic Shield 8108 |
| 8 | 7100-5994-02C | Assembly Tray 8″ EZ-DTC Ceramic Shield |
| 9 | 7100-5995-02C | Assembly Tray 6″ Ceramic Shield 8108 |
| 10 | 7100-5996-02C | Assembly Tray 6″ EZ-DTC Ceramic Shield |
| 11 | 7100-6360-01A | Assembly Tray 4″ Ceramic Shield |
| 12 | 7100-6361-01A | Assembly Tray 5″ Ceramic Shield |
| 13 | 7100-7468-01A | Tray 8″ Removable Pins |
| 14 | 7310-0692-02E | M-Tray Slip Free 6″ |
| 15 | 7310-10364-01P1 | Tray 6″ Susceptor |
| 16 | 7310-1644-01B | Tray 8″ TC Wafer |
| 17 | 7310-1766-01C | M-Tray Slip Free Option 4″ |
| 18 | 7310-1766-02C | M-Tray Slip Free Option 5″ |
| 19 | 7310-2841-02N | Isolation Tube Quartz Liner 8″ |
| 20 | 7310-2842-03D | Isolation Tube 6″ |
| 21 | 7310-2843-01A | Tray 8″ Removable Pins |
| 22 | 7310-2881-01E | Tray DTC 8″ with Pins |
| 23 | 7310-2881-02E | Tray DTC 8″ without Pins |
| 24 | 7310-2885-01D | Baffle Quartz DTC |
| 25 | 7310-2908-01B | Tray Quartz 5″ DTC |
| 26 | 7310-2935-01A | Tray Quartz 6″ DTC |
| 27 | 7310-2946-01A | Tray Quartz 5″ DTC No Slip Free |
| 28 | 7310-2998-01A | M-Tray Slip Free 3″ Wafer |
| 29 | 7310-3008-02D | Tray DTC 6″ |
| 30 | 7310-3009-01G | Liner Quartz 8″ |
| 31 | 7310-3010-02B | Liner Quartz 6″ |
| 32 | 7310-3027-01A | Tray 6″ TC |
| 33 | 7310-3452-01A | Isolation Tube 8″ without ERP Window |
| 34 | 7310-3575-01A | Inlay Quartz |
| 35 | 7310-3651-01A | Tray Slip Free 4″ |
| 36 | 7310-4434-01A | Tray 4″ 8108 |
| 37 | 7310-4763-01B | Inlay Quartz |
| 38 | 7310-4764-01B | Pin Quartz Tray |
| 39 | 7310-4765-02C | Tray 8″ Removable Pins |
| 40 | 7310-4769-01A | Tray 6″ Removable Pins |
| 41 | 7310-4781-01A | Tray 4″ Wafer Support Pin |
| 42 | 7310-5055-01B | Tray 6″ Removable Pins EZ-DTC |
| 43 | 7310-5056-01A | Tray 8″ Removable Pins EZ-DTC |
| 44 | 7310-5110-01P2 | Tray Ceramic Shield |
| 45 | 7310-5111-01P2 | Tray Ceramic Shield |
| 46 | 7310-5154-01B | Tray 4″ Autoloader |
| 47 | 7310-5190-02B | Tray Ceramic Shield 8″ 8108 |
| 48 | 7310-5192-02C | Tray Ceramic Shield 8″ EZ-DTC |
| 49 | 7310-5193-01A | Pin Ceramic Shield EZ-DTC |
| 50 | 7310-5195-02B | Tray Ceramic Shield 6″ 8108 |
| 51 | 7310-5198-02C | Tray Ceramic Shield 6″ EZ-DTC |
| 52 | 7310-5769-01M | Isolation Tube Quartz Liner 8″ |
| 53 | 7310-6043-01A | Tray Ceramic Shield 4″ EZ-DTC |
| 54 | 7310-6046-01A | Tray Ceramic Shield 5″ EZ-DTC |
| 55 | 7310-6794-01A | Chuck Quartz Hot EE |
| 56 | 7310-6961-01P1 | Isolation Tube Quartz Liner 8″ without ERP Window |
| 57 | 7310-7788-01P1 | Tray 3″ 8108 |
| 58 | 7310-8281-01A | Pin Quartz 8″ Tray |
| 59 | 7310-8838-01 | Tray 3-6″ Susceptor |
| 60 | 7310-9007-01P1 | Isolation Tube Opaque Flanges |
| 61 | 7310-9620-04A | Tube Quartz 8800 Steam Double Contained |
| 62 | 7310-9652-01U1 | Tray for Autoloader EZ-DTC |
| 63 | 7310-9653-01A | Isolation Tube Opaque Quartz Liner |
| 64 | 7310-9653-01P1 | Isolation Tube Opaque Quartz Liner |
| 65 | 7310-9817-02P2 | Tray Ceramic Novellus 8″ |
| 66 | 7310-9887-01P1 | Isolation Tube Quartz Liner Thk Flange |
| 67 | 7310-9922-01P1 | Susceptor Tray with TC |
| 68 | 7400-0003F | Tray 5″ Wafer – 610 |
| 69 | 7400-0004G | Tray 4″ Wafer – 410 |
| 70 | 7400-0008E | Tray 4″ Wafer – 610 |
| 71 | 7400-0010H | Tray Research – 610 |
| 72 | 7400-0011G | Ga As Research Tray – 410 |
| 73 | 7400-0012C | Wafer Pin Support – 410, 610 |
| 74 | 7400-0013D | Cover Research Tray – 410 |
| 75 | 7400-0017D | Cover Research Tray – 610 |
| 76 | 7400-0019F | Tray 3″ Wafer – 610 |
| 77 | 7400-0020D | Tray 4″ – 2106 |
| 78 | 7400-0022B | Tray 6″ – 2106 |
| 79 | 7400-0023-01M | Tube Isolation |
| 80 | 7400-0024-01C | Rod Quartz 3.50 |
| 81 | 7400-0024-02C | Rod Quartz 2.55 |
| 82 | 7400-0024-03C | Rod Quartz 0.45 |
| 83 | 7400-0024-04C | Rod Quartz 0.40 |
| 84 | 7400-0035C | Plate Thermocouple Holder |
| 85 | 7400-0036F | Inlay – Floating Door |
| 86 | 7400-0046C | Pin Quartz Vac Pan |
| 87 | 7400-0060-01G | M-Tray 4″ |
| 88 | 7400-0060-02G | M-Tray 5″ |
| 89 | 7400-0060-04G | M-Tray 3″ |
| 90 | 7400-0061-02C | Pin Wafer Cooling Station |
| 91 | 7400-0062-01G | M-Tray Auto 6″ |
| 92 | 7400-0063-04H | M-Tray Manual System 2″ – 610 |
| 93 | 7400-0063-05H | M-Tray Manual System 3″ – 610 |
| 94 | 7400-0063-06H | M-Tray Manual System 4″ – 610 |
| 95 | 7400-0063-07H | M-Tray Manual System 5″ – 610 |
| 96 | 7400-0063-08H | M-Tray Manual System 2″ – 410 |
| 97 | 7400-0063-09H | M-Tray Manual System 3″ – 410 |
| 98 | 7400-0063-10H | M-Tray Manual System 4″ – 410 |
| 99 | 7400-0066-02 | Isolation Tube ERP Manual Systems |
| 100 | 7400-0066-03N | Isolation Tube ERP Manual Systems |
| 101 | 7400-0068-04N | Isolation Tube Dual Perf Baffle |
| 102 | 7400-0082-01F | M-Tray 6″ Manual Systems |
| 103 | 7400-0084-03C | Tray Ga As Susceptor Manual System – 410 |
| 104 | 7400-0084-04C | Tray Ga As Susceptor Manual System – 610 |
| 105 | 7400-0085-07M | M-Tray Slip Free Option 4″ |
| 106 | 7400-0085-08M | M-Tray Slip Free Option 5″ |
| 107 | 7400-0085-09M | M-Tray Slip Free Option 6″ |
| 108 | 7400-0089-01B | Pin 3″ Wafer Cooling Station |
| 109 | 7400-0097-05C | Tray Slip Free Manual System 4″ |
| 110 | 7400-0097-06C | Tray Slip Free Manual System 5″ |
| 111 | 7400-0097-07C | Tray Slip Free Manual System 6″ |
| 112 | 7400-0100-06K | Isolation Tube |
| 113 | 7400-0101-06R | Tray 8″ |
| 114 | 7400-0102-01C | Inlay Quartz |
| 115 | 7400-0104-02C | Susceptor Tray 4100 |
| 116 | 7400-0105-01C | Support Pin |
| 117 | 7400-0105-02C | Support Pin |
| 118 | 7400-0106-06J | Tray 6″ |
| 119 | 7400-0107-01A | Tray TC Inconel 5″ |
| 120 | 7400-0108-01B | Pin Support Cover |
| 121 | 7400-0109-06K | Tray Slip Free 5″ |
| 122 | 7400-0111-01E | M-Tray Auto 6″ |
| 123 | 7400-0123-01C | Susceptor Tray Autoloader 6″ |
| 124 | 7400-0132-01C | Inlay Floating Door |
| 125 | 7400-0133-03G | Tray 8″ Removable Pins |
| 126 | 7400-0134-01C | Pin Quartz 8″ Tray |
| 127 | 7400-0136-01B | Baffle Quartz |
| 128 | 9000-0670 REV 1 | Tray 4″ Wafer |
| 129 | 9000-0690 REV 1 | Tray 5″ Wafer |
| 130 | 9000-0860A | Tray 6″ Wafer |
| 131 | 9010-0020 REV 2 | Wafer Pin Support |
| 132 | 9010-0050 REV 2 | Wafer Cover |
| 133 | 9010-0130C | Diffusion Tube |
| 134 | 9010-0270 REV 2 | Pin Support Sample |
| 135 | 9010-0300 REV 6 | Tray Research 4″ Wafer |
| 136 | 9010-0420 REV 2 | Tray 4″ Wafer |
| 137 | 9010-0440C | Plug |
| 138 | 9020-0060-01K | Tube Quartz |
| 139 | 9020-0070E | Tray 4″ Wafer |
| 140 | 9020-1920A | Pin |
| 141 | 9030-0200H | Chuck II |
| 142 | 9030-0350C | Pin Quartz |
| 143 | 9030-0380D | Tray 4″ Wafer |
Valid Time: Subject to prior sale. Check the lead time for new PO.
