Description
Glen Technologies (Yield Engineering) R3A 500W low frequency plasma asher,Glen Technologies R3A
- Glen Technologies R3A
- 2 gas inputs with needle valves
- 2 sets of 14×14 shelves
- Advanced energy PE 1000 low frequency power supply 40Khz
- Gas is introduced through a plenum in the top of chamber
- Plasma is generated vertically in Active, RIE, Electron-free modes
Please contact us if you are interested in the item. This item is only for end users and are subject to sale without notice. Appreciate your time.
SS7270
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