Gasonics Pep 3510A Plasma Asher, Dual Chamber

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Gasonics Pep 3510A Plasma Asher, Dual Chamber

• Manufacturer :  GaSonics, Pep 3510
• Model : Pep 3510A
• Condition : Used, AS IS
• • Currently Configured for 200mm Wafer Sizes• Cassette Interface:• Yaskawa Robot: Dual Blade• MKS 600 Series Pressure Controller• Axicon 2500W Microwave Power Supply• Gas Configuration: O2, N2, H2 4%/N2
• • Electrical Requirements: 208VAC, 3 Phase, 50/60Hz
• • Dual Cooling Stations
• • IBM Compter/Controller
• • Dual Chamber PEP 3510
•  (2) Open Cassette Stations
• • Install Type: Through-the-Wall