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Full line tools 200 & 300mm

Main Refurbished Equipment

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Description

Location ID: FOX-SS10685-20250218

Valid: Subject to prior sale without notice. This is only for end users. Applicate your time.

1 Adixen APR4300 Wafer Decontamination Tool Wafer Decontamination 300
2 Adixen APR4300 Wafer Decontamination Tool Wafer Decontamination 300
3 ADIXEN APR4300 Wafer Decontamination Tool Wafer Decontamination 300
4 ADVANTEST 93K PS800 ATC93K_93000_Precio 300
5 Advantest 93000 Hybrid Test (Functional / Parallel Parametic Test (pA/CMEAS)) Cell Tester 300
6 Advantest 93000 Hybrid Test (Functional / Parallel Parametic Test (pA/CMEAS)) Cell Tester 300
7 Advantest 93000 Hybrid Test (Functional / Parallel Parametic Test (pA/CMEAS)) Cell Tester 300
8 Advantest 93000 Hybrid Test (Functional / Parallel Parametic Test (pA/CMEAS)) Cell Tester 300
9 Advantest 93000 Hybrid Test (Functional / Parallel Parametic Test (pA/CMEAS)) Cell Tester 300
10 Advantest 93000 Tester 300
11 Advantest 93000 Tester 300
12 Aleris Rudolph TFM_THK_JV 300
13 AMAT AMAT CENTURA – 1 Carina CHM FinCut 300
14 AMAT PRODUCER SE TEOS CU 300
15 AMAT PRODUCER SE SICOH ultra-low-k 300
16 AMAT P5000 ILD SABPSG 200
17 AMAT ENDURA E5500 COHTI 200
18 AMAT CENTURA DXZ PASSIVATION 200
19 AMAT CENTURA MCVD SYS5200T na 200
20 AMAT CENTURA DPS na 200
21 AMAT CENTURA DPS na 200
22 AMAT Uvision 5 CFM_Brightfield Inspection 300
23 AMAT CENTURA EPI ACP 300MM RPS EPI SiGe 300
24 AMAT CENTURA ENABLER ILD ETCH SICOH 300
25 AMAT RAIDER ECD310 NI PLATE 300
26 AMAT RAIDER ECD310 COPPER SN AG PLATE 300
27 AMAT RAIDER ECD310 NI PLATE 300
28 AMAT ACMS PLATE ACMS 300
29 AMAT ACMS PLATE ACMS 300
30 AMAT CENTURA Centura TSG 300
31 AMAT CENTURA AMAT EPI 300
32 AMAT CENTURA AMAT EPI 300
33 AMAT Quantum Leap II HIGH CURRENT / LOW ENERGY IMPLANT 200
34 AMAT Frontier FRONTIER etch for Junctions – CHA-SiCoNi, CHC-Frontier CVD12x_SIN POLY ISO REMOVE 300
35 AMAT PRODUCER GT PECVD —- 3ch – CHA-SiN, CHB-SiN, CHC-SiN TFM_Etch Stop Stress Nitride 300
36 AMAT PRODUCER GT — 3ch – CHA-SiCoNi, CHB-SiCoNi, CHC -SiCoNi(NST) TFM_SICONI Etch 300
37 AMAT Producer GT Twin Chamber FCVD Oxide/low k for STI Gapfill – Fab1 DEP and CURE chambers transfer -Eterna II- CHA-FCVD, CHB-Corona Cure, CHC-Corona Cure CVD49x_FCVD 300
38 AMAT AMAT MESA (3+1) ETX41x_FinCut 300
39 AMAT SPECTRUM 300[Polyimid Rework Sink](SNK930) SNK90x_PolyimideRwk 300
40 AMAT AME P5000 NA 200
41 AMAT Uvision 6 BFIUV6_Brightfield_AMAT 300
42 AMAT ULTIMA-X HDP21x_STIFillCap 300
43 AMAT PRODUCER SE SICOH ultra-low-k 300
44 AMAT CENTURA ENABLER ILD ETCH SICOH 300
45 AMAT PRODUCER SE UV CURE 300
46 AMAT RAIDER CFD na 300
47 AMAT RAIDER ECD310 na 300
48 AMAT NANO SEM CD SEM 300
49 AMAT PRODUCER SE BPSG_SACVD_SE 300
50 AMAT VERITY SEM CDSEM 300
51 AMAT UVC na 300
52 AMAT SEM VISION G3 SEM REVIEW 300
53 AMAT VERITY 2 CDSEM 300
54 AMAT CENTURA 5200 RTX 200
55 AMAT VARIAN E220 IMPLANT 200
56 AMAT VARIAN E220 IMPLANT 200
57 AMAT VARIAN E220 IMPLANT 200
58 AMAT AMAT PRODUCER GT – 1 Nblok chm CVD93x_BLoKDep 300
59 AMAT ENDURA2 RMG Metal Dep (2x CVD Co – CH 2, CH 3) MDX45x_MetalDep 300
60 AMAT SEMVISION CX CFM 200
61 AMAT ENDURA 5500 METALS 200
62 AMAT Uvision 5 (Eval) BFIUV6_Brightfield_AMAT 300
63 AMAT CENTURA SiGe Epitaxy 300
64 AMAT ENDURA E5500 SLAB 200
65 AMAT Frontier FRONTIER etch for Junctions – CHA-SiCoNi, CHB-Frontier, CHC-Frontier CHA-SiCoNi, CHB-Frontier, CHC- 300
66 AMAT PRODUCER SE SICOH ultra-low-k 300
67 AMAT CENTURA SiGe Epitaxy 300
68 AMAT PRODUCER GT PECVD —- 3ch – CHA-PETEOS, CHB-PETEOS, CHC-PETEOS PE-TEOS 300
69 AMAT CENTURA 5200 WXZ WPLUG 200
70 AMAT Producer GT – CHA-UVCure, CHB-Co, CHC-NBlok, CHD-LLAPC CVD93x_BLoKDep 300
71 AMAT Producer GT – CHA-Co, CHB-Co, CHC-NBlok, CHD-LLAPC CVD93x_BLoKDep 300
72 AMAT PRODUCER GT SACVD —- 3ch – CHA-SACVD, CHB-SACVD, CHC-SACVD TFM_Low Dep Rate SACVD 300
73 AMAT CENTURA SiGe Epitaxy 300
74 AMAT ENDURA2 MDX89x_BarSeed_CO 300
75 AMAT Olympia SiN_LowK SWD_PE_SiN_LowK 300
76 AMAT PRODUCER SE PECVD —- 3ch – CHA-BCHD, CHB-BCHD, CHC-BCHD TFM_U-LowK Dielectric 300
77 AMAT ENDURA2 RMG Metal Dep (C – ALD TiN, D – RF PVD TiAl, E – DMD, F – DMD, 1- HP Al, 2 – CVD Co, 3 – CVD Al, 4 – PVD Ti, 5 – PVD Al) MDX43x_TiC_METALDEP 300
78 AMAT PRODUCER SE PECVD —- 3ch – CHA-BCHD, CHB-BCHD, CHC-BCHD TFM_U-LowK Dielectric 300
79 AMAT PRODUCER SE PECVD —- 3ch – CHA-BCHD, CHB-BCHD, CHC-BCHD TFM_U-LowK Dielectric 300
80 AMAT – CENTURA – (2+1+1)CH (Eval) – OBAN_GateEtch 300
81 AMAT CENTURA ULTIMA+ HDP STI 200
82 AMAT QUANTUM LEAP II Low Energy Implanter 200
83 AMAT ENDURA E5500 IMPTIN 200
84 AMAT QUANTUM LEAP LOW ENERGY IMPLANT 200
85 AMAT QUANTUM LEAP LOW ENERGY IMPLANT 200
86 AMAT ENDURA E5500 IMPTIN 200
87 AMAT QUANTUM LEAP LOW ENERGY IMPLANT 200
88 AMAT CENTURA DPS METAL ETCH 200
89 AMAT CENTURA DPS METAL ETCH 200
90 AMAT CENTURA EMXP+ OP/BP ETCH 200
91 AMAT ENDURA E5500 MCAP 200
92 AMAT ENDURA E5500 COSI2 200
93 AMAT ENDURA E5500 MCAP 200
94 AMAT CENTURA DPS METAL ETCH 200
95 AMAT ENDURA E5500 SLAB 200
96 AMAT CENTURA DXZ PASSIVATION 200
97 AMAT QUANTUM LEAP LOW ENERGY IMPLANT 200
98 AME 5000_5000_MXP FEOL RIE 200
99 AME 5200_IPS_* BEOL RIE 200
100 AME 5200_5200_IPS FEOL RIE 200
101 AME 5200_IPS_* BEOL RIE 200
102 AME 5200_IPS_* BEOL RIE 200
103 AME 5200_5200_IPS FEOL RIE 200
104 AME 5200_5200_IPS FEOL RIE 200
105 AME AME_P5000_* CVD AME 200
106 AME AME P5000 CVD AME 200
107 AME 5000 * FEOL RIE 200
108 AME AME P5000 CVD AME 200
109 AME 5000 5000 FEOL RIE 200
110 Arcadia Engineering AG-112A CONTACT ANGLE 300
111 ASM E3200 RP and Selective EPI 300
112 ASM E3200 RP and Selective EPI 300
113 ASM EagleXP/Pulsar – PM1 – XP4 HFOx DIF_RTA_GateOx_HK 300
114 ASM MIR3000 – PM1, PM2 – PE_ALD Oxide RTA43x_PE_ALD Oxide 300
115 ASM MIR3000 – PM1, PM2 – PE_ALD Oxide RTA43x_PE_ALD Oxide 300
116 ASML NXT:1950i 193NM ARF IMMERSION SCANNER 300
117 ASML XT1400 193NM ARF SCANNER 300
118 ASML AT860 248NM KRF SCANNER 300
119 ASML AT850 248NM KRF SCANNER 300
120 ASML AT860 248NM KRF SCANNER 300
121 ASML AT850 248NM KRF SCANNER 300
122 ASML AT850 248NM KRF SCANNER 300
123 ASML AT860 248NM KRF SCANNER 300
124 ASML AT850 248NM KRF SCANNER 300
125 ASML AT400 ILINE SCANNER 300
126 ASML AT400 ILINE SCANNER 300
127 ASML AT400 ILINE SCANNER 300
128 ASML 275 ILINE STEPPER 200
129 ASML XT1900 193NM ARF IMMERSION SCANNER 300
130 ASML YIELDSTAR S-200B LIT MEASUREMENT 300
131 ASML XT1900 193NM ARF IMMERSION SCANNER 300
132 ASML NXT:1950i LIT_ArF_Immersion 300
133 ASML NXT:1950i LIT_ArF_Immersion 300
134 ASML 700B NAM DUV SCANNER 200
135 ASYST WMS 2200 WAFER MANAGEMENT SYSTEM 200
136 ASYST WMS 2200 YDD WMS 200
137 ASYST WMS 2200 WAFER MANAGEMENT SYSTEM 200
138 ASYST WMS 2200 WAFER MANAGEMENT SYSTEM 200
139 ASYST WMS 2200 WAFER MANAGEMENT SYSTEM 200
140 AXCELIS FUSION 200PCU UV BAKE 200
141 AXCELIS FUSION 200PCU UV BAKE 200
142 AXCELIS FUSION 200PCU UV BAKE 200
143 AXCELIS FUSION 200PCU UV BAKE 200
144 AXCELIS FUSION 200PCU UV BAKE 200
145 AXCELIS OPTIMA MD MED CURRENT 300
146 AXCELIS OPTIMA MD MED CURRENT 300
147 AXCELIS COMPACT II FURNACE H2 reflow oven 300
148 AXCELIS FUSION 200 ACU STRIP 200
149 AXCELIS FUSION 200 ACU STRIP 200
150 AXCELIS FUSION 200 ACU STRIP 200
151 AXCELIS FUSION 200 MCU STRIP 200
152 AXCELIS FUSION 200 MCU STRIP 200
153 AXCELIS FUSION 200 MCU STRIP 200
154 AXCELIS FUSION 200 MCU STRIP 200
155 AXCELIS FUSION 200 MCU STRIP 200
156 AXCELIS FUSION 200 MCU STRIP 200
157 AXCELIS FUSION 200 MCU STRIP 200
158 AXCELIS FUSION 200 MCU STRIP 200
159 AXCELIS FUSION 200 MCU STRIP 200
160 AXCELIS GSD HE HIGH ENERGY IMPLANT 200
161 AXCELIS INTEGRA ES PLSM STRIP O2-FREE 300
162 AXCELIS FUSION 200PCU UV BAKE 200
163 AXCELIS GSD 200E HIGH CURRENT IMPLANT 200
164 BLUE M KOYO_BLUE_M_* MUV_POLY_CURE 200
165 BROOKS EUV Reticle Stocker EUV_Reticlestocker 300
166 Bruker D8 FABLINE XRD_Bruker 300
167 BRUKER D8 FABLINE XRAY DEFRACTION 300
168 BRUKER AXS TXS Material Analysis 300
169 BRUKER D8-GADDS microfocus Material Analysis 300
170 BRUKER AXS D8 Discover Material Analysis 300
171 BRUKER AFM-D500 Material Analysis 300
172 CAMECA 4000X Si std Material Analysis 300
173 CAMECA Cameca APT Flex TAP – Fab10 Transfer Material Analysis 300
174 CANON ANELVA – PMB, PMC, PMD, PME TFM_MetalGate_Canon Anelva 300
175 CDE RESMAP 273 FOUP DUAL RESISTIVITY MEASUREMENT NON METAL 300
176 CDE ResMap CDE RESMAP 463 SHEET RESISTANCE FEOL 300
177 CFM FullFlow 1/99 8100 SURFACE PREP 200
178 CFM FullFlow 1/99 8100 SURFACE PREP 200
179 CFM CFM HP 8050 CFM HP 200
180 CFM FULL FLOW_8100_* CFM HP 200
181 CFM FULL FLOW 8100 SURFACE PREP 200
182 CONCEPT PART SOLUTIONS PEP-4800DL HIO 200
183 DAIFUKU F Model Server 300
184 DAIFUKU F Model Server 300
185 DAINAN TECH (S) PTE LTD 9039 OVEN BAKE 200
186 DESPATCH PWC-48X38X64-3E – Drying Oven Drying Oven 300
187 DESPATCH PWC-48X38X64-3E – Drying Oven Drying Oven 300
188 DESPATCH PWC-48X38X64-3E – Drying Oven Drying Oven 300
189 DESPATCH PWC-48X38X64-3E – Drying Oven TBD 300
190 DISCO DGP8761 BackSideGrinding 300
191 DISCO DGP8761 BackSideGrinding 300
192 DISCO DFG840 BACKGRIND 200
193 DNS SSW80AAR SCRUBBER 200
194 DNS SS-3100 Mainframe 300
195 DNS SS-3100 Mainframe 300
196 DNS SU-3200 Single Wafer Acid Processor 300
197 DNS SU-3200 Single Wafer Acid Processor 300
198 DNS SU-3200 Single Wafer Acid Processor 300
199 DNS FC3100 MOL CLEAN 300
200 DNS SPW 813AS CMP 200
201 DNS SSW80AAR SCRUBBER 200
202 DNS WS820L RCA 200
203 EBARA EPO222 POLH OXIDE 200
204 EBARA EPO222 POLH OXIDE 200
205 EBARA EPO222 POLH OXIDE 200
206 EBARA EPO222H POLH OXIDE 200
207 EBARA EPO222H POLH OXIDE 200
208 EBARA EPO222H POLH WCMP 200
209 EBARA EPO222 POLH WCMP 200
210 EBARA EPO222 POLH STI 200
211 ENTEGRIS FLUOROWARE HTC8030 BOX WASH / CASETTE CLEANER 200
212 ENTEGRIS FLUOROWARE HTC8030 BOX WASH / CASETTE CLEANER 200
213 ESEC MICRON2 ALI 300
214 FEI ExSolve  CLM WTP PFA 300
215 FEI ExSolve WTP PFA 300
216 FEI TEM Titan G2 60-300 (image Cs corrector,multi-loaded) PFA 300
217 FILMETRICS F50 THICKNESS MEASUREMENT 300
218 FSI POLAR PHOTO 200
219 FSI POLAR PHOTO 200
220 FSI POLAR PHOTO 200
221 FSI POLAR * PHOTO 200
222 GASONICS PEP3510A RESIST STRIP 200
223 GASONICS PEP3510A RESIST STRIP 200
224 GASONICS PEP IRIDIA DL RESIST STRIP 200
225 GASONICS PEP3510A RESIST STRIP 200
226 GTI Technologies ATM na 300
227 GTI Technologies ATRM na 300
228 Hitachi CD-N CD MEASUREMENT 300
229 HITACHI CG5000 CDS50x_CDSEM_HITACHI 300
230 HITACHI CG4000 (consignment tool, to be replaced by CG5000) CDS50x_CDSEM_HITACHI 300
231 HITACHI M8000 – M8190XT SpacerEtch 300
232 HITACHI S-8840 SEM 200
233 HITACHI KOKUSAI DJ-1236VN-DF – BOAT1, BOAT2 TiN_ALD TiN_ALD 300
234 HITACHI KOKUSAI DJ-1236VN-DF – BOAT1, BOAT2 TiN_ALD FVX48x_TiN_ALD 300
235 HITACHI KOKUSAI DD1223V – BOAT1 – Harp Anneal Harp_Anneal 300
236 HITACHI KOKUSAI DJ1236VN – BOAT1 – LowK SiN FVX39x_LowK_ALDSIN 300
237 HITACHI KOKUSAI DJ-1236VN-DF – BOAT1, BOAT2 TiN_ALD FVX39x_LowK_ALDSIN 300
238 HITACHI KOKUSAI DJ-1236VN-DF – BOAT1, BOAT2 TiN_ALD FVX39x_LowK_ALDSIN 300
239 HMI ESCAN 380 EBEAM 300
240 HMI eScan 500 EBeamInspection_HMI 300
241 HSEB MMT 300 MACRO INSPECTION 300
242 HSEB MMT 300 MACRO INSPECTION 300
243 HSEB AXIOSPECT 301 Optical Review 300
244 JORDAN VALLEY JVX 7300 — XRR/XRD/XRF system XRay Film Metrology (Eval) TFM_THK_JV 300
245 JUSUNG Eureka 2000 CVD NOV 200
246 JUSUNG JUSUNG EUREKA2000 NA 200
247 KEITHLEY K255 KEITHLEY TESTER 973/1 Col. E23 (MT) 20F8161ZB TEST 200
248 KEITHLEY S450 TEST 200
249 KEITHLEY S450 TEST 200
250 KEITHLEY S450 TEST 200
251 KEITHLEY S450 TEST 200
252 KEITHLEY S475 TEST 200
253 KEITHLEY S450 TEST 200
254 KEITHLEY S450 TEST 200
255 KEITHLEY S630 TEST 200
256 KEITHLEY S630 TEST 200
257 KEITHLEY KEITHLEY S600 TEST 200
258 KEITHLEY S450 TEST 200
259 KEYSIGHT TECHNOLOGIES HP 4062UX ELECTRICAL TESTING 200
260 KEYSIGHT TECHNOLOGIES HP 4062UX ELECTRICAL TESTING 200
261 KEYSIGHT TECHNOLOGIES HP 4062UX ELECTRICAL TESTING 200
262 KEYSIGHT TECHNOLOGIES HP 4062UX ELECTRICAL TESTING 200
263 KLA 2600DUV FILM THICKNESS 200
264 KLA 5240 FILM THICKNESS 200
265 KLA 3260 FILM THICKNESS 200
266 KLA TERON650 ReticleInspect 300
267 KLA 2835 BF2835_Brightfield_KLA 300
268 KLA Tencor Spectrashape 10K LIT_MET_Scatterometry_FinFET 300
269 KLA FM 6200 NA 200
270 KLA ARCHER —- 500 OVL20x_Overlay 300
271 KLA ARCHER —- 500 OVL20x_Overlay 300
272 KLA ARCHER —- 500 OVL20x_Overlay 300
273 KLA LD10 Stripped THK20x_Spectrafilm_KLA 300
274 KLA LD10 Stripped Stripped THK20x_Spectrafilm_KLA 300
275 KLA SL536 RETICLE DEFECT INSPECTION 300
276 KLA PROFILER_P2_* ALPHA STEP 200
277 KLA PROFILER_P1_* ALPHA STEP 200
278 KLA OVERLAY_5200XP_* KLA OVERLAY 200
279 KLA DEFECT INS_AIT2_ CMP AIT2 200
280 KLA DEFECT INS 2139 CFM 200
281 KLA OVERLAY 5200XP METROLOGY 200
282 KLA VIPER PDI 2401 CFM 200
283 KLA UV1280SE FILM THICKNESS 200
284 KLA LD10 Stripped Stripped THK20x_Spectrafilm_KLA 300
285 KLA 6220 D0 MEASUREMENT 200
286 KLA UV1280SE FILM THICKNESS 200
287 KLA UV1280SE FILM THICKNESS 200
288 KLA UV1280SE FILM THICKNESS 200
289 KLA-TENCOR EDR5200 SEM REVIEW 300
290 KLA-TENCOR EDR5200 SEM REVIEW 300
291 KLA-TENCOR EDR5200 SEM REVIEW 300
292 KLA-TENCOR EDR5200 SEM REVIEW 300
293 KLA-TENCOR SCD-XT OXIDE THICKNESS 300
294 KLA-TENCOR SCD-XT OXIDE THICKNESS 300
295 KLA-TENCOR SCD-XT OXIDE THICKNESS 300
296 KLA-TENCOR VIPER MACRO INSPECTION 300
297 KLA-TENCOR AIT XUV DARK FIELD 300
298 KLA-TENCOR AIT XUV DARK FIELD 300
299 KLA-TENCOR AIT DARK FIELD 300
300 KLA-TENCOR AIT DARK FIELD 300
301 KLA-TENCOR AIT DARK FIELD 300
302 KOBELCO KOBELCO V500 Fab10 Transfer Material Analysis 300
303 KOKUSAI DJ1236VN FVX39x_LowK_ALDSIN 300
304 Lam NOVELLUS C2 CVD NOV 200
305 LAM Inova, CH1 – HCM Cu ALP (2%Mn), CH2 – RPM, CH3 – HCM Ta IONX, CH4 – Cool station, CH5 – HCM Ta IONX, CH7 – HCM Cu AS TFM_Cu Barrier Seed_Novellus 300
306 LAM Inova, CH1 – HCM Cu ALP (2%Mn), CH3 – HCM Ta IONX, CH4 – Cool station, CH5 – HCM Ta IONX, CH7 – HCM Cu AS (2%Mn)) TFM_Cu Barrier Seed_Novellus 300
307 LAM Inova TFM_TiN-HM Dep_Novellus 300
308 LAM C3 STI/STI 300
309 LAM C3 HDP STI / HDP STI 300
310 Lam METAL M ETX93x_TFHM DPT ETCH 300
311 LAM SOLA Dual Wavelength UVC51x_UVCure 300
312 LAM 2300 Exelan Flex Oxide Etch 300
313 LAM 9600 BRME WAC WIRING 200
314 LAM E4-Coronus BevelStrip 300
315 Lam 4520XL SA BEOL RIE 200
316 Lam 4520XL SA BEOL RIE 200
317 Lam 4520XL SA BEOL RIE 200
318 Lam 4520XL SA BEOL RIE 200
319 Lam 4520XL SA BEOL RIE 200
320 Lam NOVELLUS C2 CVD NOV 200
321 Lam NOVELLUS C2 CVD NOV 200
322 Lam 4520XL SA BEOL RIE 200
323 Lam NOVELLUS C2 CVD NOV 200
324 Lam NOVELLUS C2 CVD NOV 200
325 Lam NOVELLUS C2 CVD NOV 200
326 LAM VECTOR Excel – CHA-NST, CHB-AlN, CHC-NDC/ODC CVD96x_NH3 Plasma + SiC NDC 300
327 Lam E5 – Kiyo Metal HP – (2+2) ETX91x_Al Pad Etch 300
328 Lam – E5 – Kiyo EX – (3+2) CH – PM 1-5 ETX31x_Spacer Etch 300
329 LAM E5 – Kiyo FX – (3+1) CH (Fab1 PO Reroute:ETX4101) – PM 1-4 SiRecessEtch 300
330 LAM Inova, CH1 – HCM Cu ALP (2%Mn), CH2 – RPM, CH3 – HCM Ta IONX, CH4 – Cool station, CH5 – HCM Ta IONX, CH6 – HCM Ta IONX2, CH7 – HCM Cu AS TFM_Cu Barrier Seed_Novellus 300
331 LAM – E5 – Kiyo EX – (3+2) CH – PM 1-5 ETX25x_RIESOH 300
332 LAM (NOVELLUS) C2 TRIPLE SPEED HDP USG 200
333 LAM (NOVELLUS) C2 TRIPLE SPEED HDP USG 200
334 LAM (NOVELLUS) C2 TRIPLE SPEED HDP USG 200
335 LAM (NOVELLUS) C2 TRIPLE SPEED HDP USG 200
336 Lasertec EUV Reticle Back Side Inspection EUV_BacksideInspect 300
337 LEICA LEICA INS1000 CFM 200
338 LINTECH RAD3510F/12 Lamination (BackSideGrinding) 300
339 LINTECH RAD3010F/12 Peeling (BackSideGrinding) 300
340 MATTSON ASPEN2 ICP RESIST STRIP 200
341 MATTSON MILLIOS HVM – PM1 HVM – PM1 300
342 MATTSON ASPEN2 ICP RESIST STRIP 200
343 MATTSON ASPEN2 ICP RESIST STRIP 200
344 MATTSON ASPEN2 ICP RESIST STRIP 200
345 MEI STEAG REFURBISH SURFACE PREP 200
346 METRYX MENTOR DF3 MET800 300
347 METRYX MENTOR DF3 MET800 300
348 MSP CORP 2300-NPT-2 PARTICLE DEPOSITION 300
349 NA P8XL Prober Tester 200
350 NA P8XL Tester 200
351 NA P8XL Tester 200
352 NANOMETRICS Unifire 7900 Interferometer – 20nm TSV Placeholder (Eval) Profilometry 300
353 Nexx Systems Sputter 3D SPUTTER Sputter 3D 300
354 NI PXIE RTS TESTER ETEST RTS TESTER 300
355 NICOLET ECO8S * NA 200
356 NIKON S208D DUV 300
357 NIKON S208D DUV 300
358 NIKON S208 248NM KRF SCANNER – NON CRITCAL LAYER 300
359 NIKON S208 248NM KRF SCANNER – NON CRITCAL LAYER 300
360 NIKON NSR-2205 EX14C Stepper 200
361 NIKON NSR-2205 EX14C Stepper 200
362 NIKON EX14 DUV STEPPER 200
363 NIKON I12 ILINE STEPPER 200
364 NIKON I12 ILINE STEPPER 200
365 NIKON I12 ILINE STEPPER 200
366 NITTO DETAPER Tester 300
367 NOVA T500 Profile Measurement 300
368 Novellus VECTOR EXPRESS SYSTEM PECVD VECTOR EXPRESS SYSTEM 300
369 NOVELLUS Sabre Classic VIAFORM PLATING 200
370 NOVELLUS C2 DUAL SEQUEL NIT MIM 200
371 OEM GROUP HEATPULSE 8108 RTX 200
372 OEM GROUP HEATPULSE 8108 RTX 200
373 OEM GROUP HEATPULSE 8108 RTX 200
374 OEM GROUP HEATPULSE 8108 RTX 200
375 OXFORD INSTRUMENTS OpAL RPT ALD for Hafnium PFA 300
376 Park System NX HiVac Material Analysis 300
377 PHOENIX MICROMEX SE 160T XRAY 300
378 POONGSAN GENI High Pressure Anneal 300
379 RCS 300PS-M100 PAD SHAVE 300
380 RECIF RSC122 FEOL MANUAL 300
381 RECIF RSC142 BEOL AUTO 300
382 RICOR CRYOGENIC AND VACUUM SYSTEM N2 PURGE 300
383 Rorze EUV Reticle Handling EUV_ReticleHandler 300
384 RUDOLPH S3000S TFM_THK_Rudolph 300
385 RUDOLPH S3000S TFM_THK_Rudolph 300
386 RVSI WS-3800 WAFER INSPECTION SYS 300M 200
387 RVSI WS-3800 WAFER INSPECTION SYS 300M 200
388 RVSI ws-3000hs PPF 200
389 SANKYO SWH80 RCA 200
390 SANKYO SWH80 RCA 200
391 SARTORIUS LA310S ALI 300
392 SCREEN SU3000 BEOL SW-Clean DHF 300
393 Screen SU3100  – MPC3,MPC4 Nitric HiK backside cleans with HF and HF/HNO3, Frontside SPM post ash, trench hardmask removal with HF/H2SO4 300
394 Screen SU3100 – 8ch – MPC 1-8 – SC1, Ammonia, Peroxide, HF, IPA SNK45x_M_SWC 300
395 Screen SU3100 —- 8ch – MPC 1-8 – TMAH TMAH 25%/2.5% – TJ Cavity Etch 300
396 Screen SU3100 – 8ch – MPC 1-8 – SC1, Ammonia, Peroxide, HF, IPA Hot Ultra-DHF Confguration 300
397 SEMES BLEUICE PRIME – CH 1-8 – SC1, Ammonia, Peroxide, Sulfuric, IPA SNK65x_DSP STRIP 300
398 SEMES BLEUICE PRIME – CH 1-8 – SC1, Ammonia, Peroxide, Sulfuric, IPA SNK65x_DSP STRIP 300
399 SEMES LOZIX ALT80x_SOHCoat 300
400 SEMES LOZIX ALT80x_SOHCoat 300
401 SEMES LOZIX 4 Cup + 12 UHP + 8 CP 4 Cup + 12 UHP + 8 CP ALT80x_SOHCoat 300
402 SEMES LOZIX 4 Cup + 12 UHP + 8 CP 4 Cup + 12 UHP + 8 CP ALT80x_SOHCoat 300
403 SEMIgear GENEVA REFLOW GENEVA 300
404 SEMIgear, Inc. GENEVA STP300 REFLOW/REOXIDE 300
405 SEMI-PROBE PS4L SA12 Prober 300
406 SEMITOOL MAGNUM ALEG380 CLEAN 200
407 SEMITOOL MAGNUM ALEG380 CLEAN 200
408 SEZ 203 BACKSIDE CLEAN 200
409 SEZ 223 POST METAL CLEAN 200
410 SEZ 203 BACKSIDE CLEAN 200
411 SEZ 223 POST METAL CLEAN 200
412 SOLVISION PRECIS 3D C4B INSP 300
413 SOLVISION PRECIS 3D C4B INSP 300
414 SOLVISION PRECIS 3D na 300
415 STEAG AWP AWP SURFACE PREP 200
416 STEAG AWP AWP SURFACE PREP 200
417 Suss ACS300 ACS300 300
418 Suss Laser Ablation Laser Ablation 300
419 SVG SVG VTR7000 FURNACES 200
420 SVG SVG VTR7000 FURNACES 200
421 SVG SVG VTR7000 FURNACES 200
422 SVG TR700 VTR7000 FURNACES 200
423 SVG SVG VTR7000 FURNACES 200
424 SVG SVG VTR7000 FURNACES 200
425 SVG SVG VTR7000 FURNACES 200
426 SVG SVG VTR7000 FURNACES 200
427 SVG SVG VTR7000 FURNACES 200
428 SVG VTR7000 TEOS 200
429 SVG VTR7000 TEOS 200
430 TBD TIM & LID ADHESIVE DISPENSER ALI 300
431 TEL LITHIUS PRO-V (Fab1 PO reroute: TRK4361) LIT_ArF_Immersion 300
432 TEL LITHIUS PRO-i ARFIM 300
433 TEL LITHIUS PRO-V 6-ADH + 4-BCT + 4-BST + 2 PIR + 4 CHHA + 20-CGRA + 8-CPRPP + 4-COT + 8-CSWP +8-DEV + 2-RCPL + 4-TCT + 2-RSM + 12-SCPL + 1-WEE + 1-BWEE LIT_ArF_Immersion 300
434 TEL LITHIUS PRO-V 6-ADH + 4-BCT + 4-BST + 2 PIR + 4 CHHA + 20-CGRA + 8-CPRPP + 4-COT + 8-CSWP +8-DEV + 2-RCPL + 4-TCT + 2-RSM + 12-SCPL + 1-WEE + 1-BWEE LIT_ArF_Immersion 300
435 TEL LITHIUS PRO-V 6-ADH + 4-BCT + 4-BST + 2 PIR + 4 CHHA + 20-CGRA + 8-CPRPP + 4-COT + 8-CSWP +8-DEV + 2-RCPL + 4-TCT + 2-RSM + 12-SCPL + 1-WEE + 1-BWEE LIT_ArF_Immersion 300
436 TEL LITHIUS PRO-V 6-ADH + 4-BCT + 4-BST + 2 PIR + 4 CHHA + 20-CGRA + 8-CPRPP + 4-COT + 8-CSWP +8-DEV + 2-RCPL + 4-TCT + 2-RSM + 12-SCPL + 1-WEE + 1-BWEE LIT_ArF_Immersion 300
437 TEL TEL TACTRAS VIGUS ATCC – 4 LK3 chm ETX86x_ILDEtch_LK3 300
438 TEL LITHIUS ARF 248NM KRF TRACK 300
439 TEL LITHIUS ARF 248NM KRF TRACK 300
440 TEL LITHIUS 2BLK ILINE SCANNER TRACK 300
441 TEL LITHIUS 2BLK ILINE SCANNER TRACK 300
442 TEL Prober – Precio ATCWET_4082_Precio 300
443 TEL Precio —- Clean&Cold V93K Interface ATC93K_93000_Precio 300
444 TEL Precio —- Clean&Cold V93K Interface Tester 300
445 TEL LITHIUS ARF 248NM KRF TRACK 300
446 TEL Indy IRAD Furnace 300
447 TEL TRIAS e+ TiN MDX47x_MG_ALD TIN 300
448 TEL ALPHA 8S DENSIFICATION 200
449 TEL ALPHA 8S GATE OX 200
450 TEL ALPHA 8S GATE OX 200
451 TEL ALPHA 8S GATE OX 200
452 TEL ALPHA 8S GATE OX 200
453 TEL ALPHA 8S LPCVD NITRIDE 200
454 TEL ALPHA 8S LPCVD NITRIDE 200
455 TEL ALPHA 8S LPCVD NITRIDE 200
456 TEL ALPHA 8S LPCVD NITRIDE 200
457 TEL P8 ELECTRICAL TESTING 200
458 TEL P8 ELECTRICAL TESTING 200
459 TEL P8 ELECTRICAL TESTING 200
460 TEL P8 ELECTRICAL TESTING 200
461 TEL ACT8 3C3D ILINE TRACK 200
462 TEL ALPHA 8S WELL DRIVE 200
463 TEL ALPHA 8S WELL DRIVE 200
464 TEL LITHIUS 3BLK 193NM ARF IMMERSION SCANNER 300
465 TEL TACTRAS CONTACT ETCH 12FDX 300
466 TEL P12XL PARAMETRIC TESTER 300
467 TEL P12XL PARAMETRIC TESTER 300
468 TEL Alpha-303i High temp oxide 300
469 TEL Indy IRAD Furnace 300
470 TEL TELIUS Poly FEOL Etch 300
471 TEL Wafer Bond Wafer Bond 300
472 TEL ACT 12 248NM KRF TRACK 300
473 TEL ACT 12 248NM KRF TRACK 300
474 TEL LITHIUS 2BLK 248NM KRF TRACK 300
475 TEL LITHIUS 2BLK 248NM KRF TRACK 300
476 TEL LITHIUS 3BLK 193NM ARF SCANNER 300
477 TEL INDY-PLUS – BOAT1, BOAT2 ALD_Ox FVX41x_Mid_Temp_ALD_Ox 300
478 TEL Indyplus FVX99x_OBSOLETE 300
479 TEL CERTAS WING DCL10x_ChemOxRemoval 300
480 TEL TACTRAS VIGUS ATCC LK3 ContactEtch 300
481 TEL TRIAS e+ TiN MDX47x_MG_ALD TIN 300
482 TEL INDYPLUS FVX99x_OBSOLETE 300
483 TEL INDYPLUS FVX99x_OBSOLETE 300
484 TEL INDYPLUS iRAD_OXIDE – BOAT1 – IRAD Oxide FVX44x_HTOX 300
485 TEL INDYPLUS iRAD_OXIDE – BOAT1 – IRAD Oxide FVX44x_HTOX 300
486 TEL LITHIUS 2BLK 248NM KRF SCANNER – NON CRITCAL LAYER 300
487 TEL Alpha-303i P-Doped Poly 300
488 Tel P12XL Inline test prober 300
489 TEL Precio NANO Tester 300
490 TEL Precio Nano Tester 300
491 TEL P12XL PPF 200
492 TEL P12XL PPF 200
493 TEL P8XL PPF 200
494 TEL P8XL PPF 200
495 TEL P8XL Prober PPF 200
496 TEL P8XL PPF 200
497 TEL P8XL Prober PPF 200
498 TEL UNITY2E 85DD AB ETCH 200
499 TEL INDYPLUS-A [Gate_Poly] 300
500 TEL LITHIUS Pro-Z ALT66x_B 300
501 TEL LITHIUS Pro-Z ALT66x_B 300
502 TEL ALPHA 8S LPCVD POLY 200
503 TEL TACTRAS VIGUS ATCC – 6ch – ContactEtch_HK 6CH – PM 1-6 LK2 BSP w/ 200mm exhaust ILDEtch_HM 300
504 TEL INDYPLUS FVX43x_MSHTO 300
505 TEL INDYPLUS – BOAT1, BOAT2 HK POLY FVX43x_MSHTO 300
506 TEL TACTRUS VIGUS ATCC ILDEtch_HM 300
507 TEL TACTRAS VIGUS ATCC – 6ch – ILDEtch_HM 6CH – PM1,2,5,6 – LK2 BSP w/ 200mm exhaust, PM3,4 – LK3 QRE + ALE Rev1 ESC ILDEtch_HM 300
508 TEL TACTRAS NCCP (IBM Paid Tool) 4ch (Original Config) GatePatterning 300
509 TEL TACTRUS VIGUS ATCC ILDEtch_HM 300
510 TEL TACTRAS VIGUS ATCC – 6ch – ILDEtch_HM 6CH – ETX86x_ILDEtch_LK3 300
511 TEL ACT8 ILINE TRACK 200
512 TEL ACT8 ILINE TRACK 200
513 TEL MARK8 DUV TRACK 200
514 TEL ACT8 2C2D ILINE TRACK 200
515 TEL UNITY2E 85DD VIA ETCH 200
516 TEL UNITY2E 85DD VIA ETCH 200
517 TEL ACT8 4C4D DUV TRACK 200
518 TEL MARK8 2C BARC COAT 200
519 TEL ALPHA 8S LPCVD POLY 200
520 TEL ALPHA 8S LPCVD NITRIDE 200
521 TEL UNITY2E 85DD VIA ETCH 200
522 TEL UNITY2E 85DD VIA ETCH 200
523 TEL UNITY2E 85DD CONTACT ETCH 200
524 TEL UNITY2E 85DD VIA ETCH 200
525 TEL (FSI) ZETA SALICIDE STRIP – COSI2 200
526 TENCOR AIT II AIT 2 200
527 TENCOR DEFECT INS_AIT2_ AIT 2 200
528 TENCOR AIT1 CMP AIT2 200
529 TENCOR TENCOR_DEFECT INS_AIT1 CFM 200
530 TORR International MSS3G2 Material Analysis 300
531 ULTRON SYSTEM, INC UH104-8 UV CURE 200
532 UNAXIS CLUSTERLINE300 UBM DEP 300
533 UNIVERSAL PLASTICS Semi-Auto Wet Bench IPASA 200
534 VARIAN EHP500 MEDIUM CURRENT IMPLANT 200
535 VARIAN EHP500 MEDIUM CURRENT IMPLANT 200
536 VWR VWR SHELDON Oven 1601 Oven 300
537 WESTECH 372 M CMP 200
538 WESTECH 372 M CMP 200
539 WESTECH 372 M CMP 200
540 WESTECH 372 M CMP 200
541 WESTECH 372 M CMP 200
542 WESTECH 372 M CMP 200
543 WESTECH 372 M CMP 200
544 WESTECH 372 M CMP 200
545 WESTECH 372 M CMP 200
546 WESTECH 372 M CMP 200
547 WESTECH 372 M CMP 200
548 WESTECH 372 M CMP 200
549 WESTECH 372 M CMP 200
550 WONIK IPS MAHA MP – PMA-SiON, PMB-SiON, PMC-SiON CVD76x_ARL 300
551 WONIK IPS MAHA MP – PMA-SiON, PMB-SiON, PMC-SiON TBD 300
552 Zeiss NanoFab FAL LAB 200
553 ZEISS AXIOTRON SCOPE 200

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