Description
| 1 | 0010-00889,ASSY LIFTER DEGAS/ ORIENTER w/ TC |
| 2 | 0010-01712,5500 Tube Robot IMP Chamber ASSY |
| 3 | 0010-02142,Throttle Valve Assy |
| 4 | 0010-13264,5200 Tube Robot TIN Chamber Assy |
| 5 | 0010-13774,ASSY, WAFER LIFT COOLDOWN/PASSTHRU |
| 6 | 0010-13927,PEDESTAL LIFT ASSEMBLY PRECLEAN |
| 7 | 0010-20129,6″ Buffer Blade Assembly |
| 8 | 0010-20130 ,6″ Shutter Disk |
| 9 | 0010-20132, 6″ Transfer Blade Assy |
| 10 | 0010-20133,8″ Transfer Blade Assy |
| 11 | 0010-20252,Wafer Rotation Assy |
| 12 | 0010-20300,ENDURA WAFER LIFT ASSEMBLY PVD CHAMBER |
| 13 | 0010-20317,8″ LAMP MODULE |
| 14 | 0010-20351,6 INCH DEGAS LAMP MODULE 350C PVD |
| 15 | 0010-20753,WAFER LIFT ASSEMBLY Preclean II |
| 16 | 0010-21631,A B Chamber Lid |
| 17 | 0010-35756, CVD Cooldown Chamber Assy |
| 18 | 0010-37264,Cooldown Chamber Multi Slot Ass’y |
| 19 | 0010-38646,TXZ CHAMBER HINGE ASSY |
| 20 | 0010-70271,EN DURA ASSY 101 WAFER LIFT |
| 263 | 0015-00-06,Ceramic Ring |
| 21 | 0020-05364,DISK, 8 SHUTTER, SNNF BESCICEW |
| 22 | 0020-05749,ADAPTOR W/B LOADLOCK ENDURAI/F |
| 23 | 0020-08677 ,SHIELD UPPER GROUNDED |
| 24 | 0020-10186, COVER TOP 200MM |
| 25 | 0020-15016,Upper shields |
| 26 | 0020-18273, BODY, Throttle valve HDP,CVD |
| 27 | 0020-20114,ISOLATOR, DC BIAS |
| 28 | 0020-20123,HEATER, ISOLATOR CERAMIC |
| 29 | 0020-20126,STAND-OFF, CERAMIC DC BIAS |
| 30 | 0020-20169 |
| 31 | 0020-20169,INSULATOR SOURCE 13″ |
| 32 | 0020-20170 |
| 33 | 0020-20170,COVER, INSULATOR 13″ 2ND SOURCE |
| 34 | 0020-20430,COLLIMATOR 81NCH |
| 35 | 0020-20431,COLLIMATOR, 6 INCH |
| 36 | 0020-20521,SPACER, INSULATOR LIFTER |
| 37 | 0020-20587,INSERT, SLIT VALVE MONOLITH |
| 38 | 0020-20691,PEDESTAL CD/PT WAFER200 MM |
| 39 | 0020-20896,REFLECTOR HEATER, 5/6″,DEGAS |
| 40 | 0020-20897,LAMP RETAINER SOCKET |
| 41 | 0020-21218,BASE CD WAFER 200 MM |
| 42 | 0020-21219,BASE CD/PT WAFER 1 S0MM |
| 43 | 0020-21221,HOOP CD 200MM |
| 44 | 0020-21222,HOOP CD/PT 150 MM |
| 45 | 0020-21361,CLAMPING RING 6″ AL JAPAN MAJOR |
| 46 | 0020-21462,INSULATOR SOURCE 11.30″ |
| 47 | 0020-21664,INSULATOR SOURCE 13″ |
| 48 | 0020-21684,CASE WINDOW ORIENTER |
| 49 | 0020-21686,DISK HEATER, DEGAS CHAMBER |
| 50 | 0020-22362,6″ LIFTER TC |
| 51 | 0020-22838,LIFT HOOP, PRECLEAN |
| 52 | 0020-22844,PEDESTAL SHIELD, 8″ |
| 53 | 0020-22909,PEDESTAL SHIELD 6INCH PRECLEAN |
| 54 | 0020-22975,INSULATOR TIN 8INCH WAFER |
| 55 | 0020-23067,LIFT HOOP 6″ 101% |
| 56 | 0020-23093,WASHER INSULATOR FOR PVD LIFTER |
| 57 | 0020-23350,SHIELD RF HEATER/ APPLIED MATERIALS |
| 58 | 0020-23442,COVER PLUMBING MOTORIZED LFT |
| 59 | 0020-23478,SHIELD HEATER MOTORIZED LIFT |
| 60 | 0020-23479,PLATE MNTG PNEUM CYLMTR LFT |
| 61 | 0020-23753,PEDESTAL LIFT SLEEVE PRECLEAN |
| 62 | 0020-24057,Bracket Valve Water |
| 63 | 0020-24235,RF TUBE PRECLEAN |
| 64 | 0020-24706,COVER RING, 8 , 2 TABS,A101, TIN. |
| 65 | 0020-24896,COVER RING 6″ SST 101 AL |
| 66 | 0020-24896,COVER RING 6″ SST 101 AL |
| 67 | 0020-24914,COVER RING SST SINGH 101 COVERAGE |
| 68 | 0020-24914,COVER RING SST SINGH 101 COVERAGE |
| 69 | 0020-25256,8″SHUTTER DISK |
| 70 | 0020-25279,8″CLAMP RING |
| 71 | 0020-25342,HTHU 6 HOOP |
| 72 | 0020-25344, |
| 73 | 0020-26254,INSULATOR CERAMIC DURASOURCE TTN |
| 74 | 0020-26383,SOUP BOWL DUAL ROBOT |
| 75 | 0020-26474,6″CLAMP RING |
| 76 | 0020-26583,6″ Shutter Disk |
| 77 | 0020-26971,61NCH Tl SHUTTER DISK |
| 78 | 0020-26973,8″ Tl SHUTTER DISK |
| 79 | 0020-27103,Lift Hoop 8″ Heated 101 |
| 80 | 0020-27113,CLAMP RING 6 SMF Tl |
| 81 | 0020-27123,PEDESTAL, PCII 8″ |
| 82 | 0020-27205, CLAMP RING 8″ SNNF HTHU 6 PADS |
| 83 | 0020-27207,CLAMP RING 6″ SMF PADDED HTHUHTR |
| 84 | 0020-27455,DISK 8″ ADVANCED 101 SHUTTER |
| 85 | 0020-27702, CLAMP RING SINGH SNNFTI |
| 86 | 0020-27819,Cover Ring Advanced 101 Coherent TTN |
| 87 | 0020-27869,PEDESTAL 6INCH SMF |
| 88 | 0020-28205,6″ Tl COVER RING |
| 89 | 0020-28239,HOOP 8″, ADV 101 STD BODY3 |
| 90 | 0020-28258,LIFT HOOP 6″ ADV 101 WB |
| 91 | 0020-28346,8″CLAMP RING |
| 92 | 0020-28364,BLADE 6″ ADV 101 SHUTTER |
| 93 | 0020-28392,DISK, 6″ ADVANCED 101 SHUTTER |
| 94 | 0020-28937,PEDESTAL, 8 INCH |
| 95 | 0020-29202,SMF DURA TTN-SST 10 401ARS 6″ Clamp Ring |
| 96 | 0020-30086, Plate, Perforated, 150mm |
| 97 | 0020-30580, BLOCKER PERF COM SIL4-61NCH |
| 98 | 0020-30797, PERFORATED PLATE SHOWER HEAD |
| 99 | 0020-32036, PLATE BLOCKER .100SX, UNIVERSAL CHMBR MES |
| 100 | 0020-33806, UPPER CHAMBER DPS + POLY |
| 101 | 0020-34445,BLOCKER PLATE DXZG |
| 102 | 0020-34694, LINER, GDP, R2 OXIDEGECO |
| 103 | 0020-34695,LINER, CATHODE, FULL FLOW.OXIDE |
| 104 | 0020-34696,SLIT VALVE LINER |
| 105 | 0020-34736,DxZ Gas Manifold Input |
| 106 | 0020-35326,GAS INLET COVER |
| 107 | 0020-40946,CLAMP RING, 8″ SNNF, AL |
| 108 | 0020-42285,PLATE,BLOCKER 8″ EC WXZ |
| 109 | 0020-42287,PLATE PERF 81NCH EC WXZ |
| 110 | 0020-70284,TUBE, ROBOT |
| 111 | 0020-70375,COVER CHAMBER |
| 112 | 0020-70376,Degas chamber 2nd Source New |
| 113 | 0020-75851, VHP BUFFER LID |
| 114 | 0020-90213, BLOCKER PLATE,SILANE 200MM |
| 115 | 0020-91291, DOOR SLIT LINER, 300MM eMAX |
| 116 | 0021-00041, FACEPLATE SIN XG DXZ DCVD |
| 117 | 0021-00042,Faceplate TEOS DXZ DCVD |
| 118 | 0021-01569-001,BLOCKER PLATE |
| 119 | 0021-01570, BLOCKER PLATE, HE, GIGA-FILL SACVD |
| 120 | 0021-01572, FACEPLATE, GIGA- FILL SACVD |
| 121 | 0021-02395 REY.B, INSERT RING,ALUMINUM DXZ SACVD |
| 122 | 0021-02468,LINER EXHAUSTTXZ 200MM |
| 123 | 0021-02983,TXZ Inner Shield |
| 124 | 0021-06092,DOOR SLIT LINER |
| 125 | 0021-09077,ADAPTER MCVD/DCS CHAMBER |
| 126 | 0021-09625, CHAMBER LOWER DPS |
| 127 | 0021-09723,Carrier Upper Heater Lift DXZ |
| 128 | 0021-09760, GAS BOXDXZ |
| 129 | 0021-09835,R2 LINER |
| 130 | 0021-11747,COVER PEDESTALS” A101 |
| 131 | 0021-12737,LIFTER 8″ ULTRA |
| 132 | 0021-12887,S”CLAMP RING |
| 133 | 0021-20044,PVD 2ND SOURCE NEW PARTS-DISK DISK 6″8101 SHUTTER SST |
| 134 | 0021-20572,PEDESTAL, 6ADV.101 FULL CVRG |
| 135 | 0021-20718,Pedestal Cover Lower 8″ B101 |
| 136 | 0021-22028,PEDESTAL,8″ 101 COVERAGE ENTIRE TEXTURED |
| 137 | 0021-23198,HOOP LIFT OPEN 8 INCH MCA E-CHUCK |
| 138 | 0021-35749,Ring, Isolator TXZ, 200 mm |
| 139 | 0021-35753, Ring lsolatorTXZ 150MM SMF |
| 140 | 0021-35922, CHAMBER BODY, TXZ MCVD |
| 141 | 0021-35945,EDGE RING, TXZ 150MM SMF |
| 142 | 0021-35945,EDGE RING, TXZ 150MM SMF |
| 143 | 0021-35946,Edge Ring, TXZ, 200MM, SNNF |
| 144 | 0021-36743, DPS POLY LOWER CHAMBER |
| 145 | 0021-37495 REV.001, BASE,WRIST INVERTED MOUNTING HP+ENP ROBOT |
| 146 | 0021-37496 REV A, TOP,WRIST INVERTED MOUNTING HP+ENP ROBOT |
| 147 | 0021-39385-003, LID PLATE SSGD R2 CHAMBER |
| 148 | 0021-76356 , BLADE, HP UPGRADE, 6 IN |
| 149 | 0021-76708,PEDESTAL CD/PT WAFER 150MM |
| 150 | 0030-70048,SLIT VALVE DOOR ENDURA CENTURA |
| 151 | 0040-00684,GATE VALVE ADAPTER PLATE,TXZCHAMBER |
| 152 | 0040-00796,GAS BOX CHAMBER LID 200MM PRODUCER |
| 153 | 0040-01973 REY.004, CHAMBER BOTTOM RADIANCE 200MM RTP |
| 154 | 0040-02544, Upper Body, DPS Metal |
| 155 | 0040-02609,LINER SLIT LINER DOOR |
| 156 | 0040-02938,GAS MANIFOLD OUTPUT 200MMTXZ |
| 157 | 0040-04745, Chamber Body Ultima Hdp-cvd, |
| 158 | 0040-04745,Chamber body HDP-CVD |
| 159 | 0040-05142,WELDMENT HEATER CONN HPTXZ |
| 160 | 0040-05294,INPUT MANIFOLD WATER, HP TXZ 200MM CIP |
| 161 | 0040-06711,ESC ANTI-LIFT BRACKET |
| 162 | 0040-09001, Chamber Body, Standard 4-6″ |
| 163 | 0040-09094, CHAMBER 200mm |
| 164 | 0040-09095,GAS BOX, WCVD |
| 165 | 0040-09212,ASSY WAFER LIFT RING CERAMIC |
| 166 | 0040-09723-C, Unibody, Etch Chamber |
| 167 | 0040-09893, CHAMBER BODY,R2,EDGES GAS FEED |
| 168 | 0040-09963,PEDESTAL, 1 S0MM FLAT,IS,NI LIFT2,HVCEN |
| 169 | 0040-13865, BOOY 200MM CHAMBEY PRODUCER |
| 170 | 0040-20313,HOOP LIFT 6″ WELDMENT |
| 171 | 0040-20726,SHIELD,HTHU HEATER RF TOP |
| 172 | 0040-21172,VHP, ROBOT HOUSING |
| 173 | 0040-22451,FACE PLATE, BKM3 TXZ 200MM |
| 174 | 0040-22570,MTG PLATE PCII W/TURBO RF MATCH |
| 175 | 0040-22746,BLOCK MOUNTING |
| 176 | 0040-25451,FACE PLATE, BKM3 TXZ 200MM |
| 177 | 0040-31942,CHAMBER BODY, ETCH, OXIDE, SIDE GAS FEED |
| 178 | 0040-31980, GAS BOX EC WXZ |
| 179 | 0040-33998,LINER SLIT LINER DOOR |
| 180 | 0040-34865,LINER DGDP CHAMBER WAFFLE- LESS 200MM |
| 181 | 0040-34866,LINER CATHODE MAG RING |
| 182 | 0040-35057 REV.C, WELDMENT,SLIT VALVE INSERT,PROCESS CHAMBER |
| 183 | 0040-37667,LID PLATE TXZ CIP |
| 184 | 0040-39553, CHAMBER BODY, DXZ |
| 185 | 0040-39883, 5000/5200 WXZ CHAMBER |
| 186 | 0040-43884, PLATE CLAMP LID 300MM,EMAX Part |
| 187 | 0040-44480,PLATE,CLAMP LID |
| 188 | 0040-45505,COLLAR,DRIVE,HEATER LIFT TXZ |
| 189 | 0040-45511 REV 003,COLD PLATE, 200MM, HDPCVD |
| 190 | 0040-46663,Plate, Lid, 200mm |
| 191 | 0040-50414,DOOR SLIT VALVE WAFFLE-LESS 200 EMAX |
| 192 | 0040-61266,GAS BOX SIN DXZ DCVD |
| 193 | 0040-63457,WATER BOX, TXZ 200MM Cl P |
| 194 | 0040-70319,FACEPLATE.WATER COOLED,SACVD200mm PRODUCER |
| 195 | 0040-75902,TUBE ROBOT |
| 196 | 0040-76838,Lid Plate TxZ 200mm CIP |
| 197 | 0040-77771, DPS ESC |
| 198 | 0040-79912, LINER CHAMBER WLEAK CHECK PORT, 300MM EMAX |
| 199 | 0040-79913,CATHODE LINER,W/LEAK, CHECK PORT,300MM |
| 200 | 0040-79914, DGDP |
| 201 | 0040-99952, ESC#29 |
| 202 | 0041-07797,12″ HDP |
| 203 | 0200-00137,Focus Ring Ceramic DPS |
| 204 | 0200-00218,Cover Top Quartz 8″ PCII |
| 205 | 0200-00221,INSULATOR QUARTZ, 8inch |
| 206 | 0200-00234,ISOLATOR BKM1 ENHANCED TXZ200MM |
| 207 | 0200-00296,SLEEVE JUNCTION SIN DXZ |
| 208 | 0200-00417,INSERT RING.SILICON 1 S0MM,FLAT. |
| 209 | 0200-00435,Top Ring, Silicon |
| 210 | 0200-00622,RING OUTER 200MM WXZ.+NCSR |
| 211 | 0200-00689,Lid Liner, 200mm |
| 212 | 0200-00950,COLLAR LOW PROFILE 150MM SMF HDP-CVD ULT |
| 213 | 0200-01173,INSULATOR, QUARTZ 6″ SMF PIKII PCIICH |
| 214 | 0200-01176,QUARTZ, COVER, TOP, 6″ PIK II PCII |
| 215 | 0200-01798,PIN, LIFT, TXZ HEATER, SINGLE TAPER, CER |
| 216 | 0200-01808,SINGLE RING CERAMIC 300MM NOTCH |
| 217 | 0200-01808,SINGLE RING CERAMIC 300MM NOTCH |
| 218 | 0200-02420,DEP RING, 200MM SIPTTN W/ BESC, CERAMIC |
| 219 | 0200-09027,Adapter Pumping Plate |
| 220 | 0200-09216,RING, PEDESTAL, QUARTZ, 6″ |
| 221 | 0200-09315,HChuck, ESC Cover Ring, Ceramic, |
| 222 | 0200-09597,LIFT PIN, 125MM,CHUCK |
| 223 | 0200-09950, ISOLATOR EC WXZ. |
| 224 | 0200-10004,Inner Ring 150 SMF SMM |
| 225 | 0200-10074,LIFT PIN DELTA MF NITRIDE XP200MM |
| 226 | 0200-10157,LINER JUNCTION, CERAMIC SIN DXZ |
| 227 | 0200-10163,ISOLATOR SIN ENHANCED PUMPING LID DXZ |
| 228 | 0200-10164,Pumping Insert Shield |
| 229 | 0200-10192,SHIELD DELTA NITRIDE 200MM |
| 230 | 0200-10377,RING SINGLE 195MM SEMI NT CERDPSCHMB |
| 231 | 0200-10650,COVER,CERAMIC PUMPING CHANEL |
| 232 | 0200-18081,COVER LOW PROFILE |
| 233 | 0200-18109,HDP 5200 CVD Ceramic Solar |
| 234 | 0200-20054,Insulator Qtz 6″ SMF ATA Preclean |
| 235 | 0200-20210,INSERT, DOUBLE RF CONNECTOR, VECTRA IMP |
| 236 | 0200-20215,HOUSING DOUBLE RFCONNECTOR VECTRA IMP |
| 237 | 0200-20285,PEDESTAL COVER UPPER 8″ B101 |
| 238 | 0200-20315,REST BUTTON B101 CERAMIC , NEW |
| 239 | 0200-20325,Pedestal Ring, 150mm,Ceramic, B101 IMP |
| 240 | 0200-20331,COVER RING 8″ B101 CERAMIC, 10.75″ OD |
| 241 | 0200-20348,COVER RING 6″ B101 |
| 242 | 0200-20426,Insulator Pinless Quartz 8″ SNNF Preclean II |
| 243 | 0200-26753,WASHER HTHU HOOP INSULATOR |
| 244 | 0200-27122,6″PEDESTAL |
| 245 | 0200-35706,SHADOW RING |
| 246 | 0200-35834,Ceramic Ring |
| 247 | 0200-36105,CHAMBER INSERT 200MM TXZCIP |
| 248 | 0200-36691, RING, SINGLE, LOW PROFILE,150MM SMF |
| 249 | 0200-39274,SACVD Ceramic Pumping Ring |
| 250 | 0290-35673-01 , DXZ SIN Chamber ASSY |
| 251 | 0290-35673-02,DXZ TEOS Chamebr Assy |
| 252 | 0290-35673-03, DXZ TEOS Chamber Assy with RPS |
| 253 | 16-033932-00, 6 inch showhead WELD |
| 254 | 19-00155-XX_AC, Heater Block, 150mm |
| 255 | 19-024277-01, HEATER, 8 inch |
| 256 | 215-00042-000-A05, PROCESS CHAMBER |
| 257 | 715-028405-001 D, Housing, Lower Reaction Chamber |
| 258 | 715-031986-005,HSG LWR REACTION CHAMBER |
| 259 | 715-130080-008, HLDR,WFR 8″”,RDC PKT,W/ALIGN |
| 260 | 715-330106-003C, HSG MDL RCTN CHMBR FXD GAP |
| 261 | 715-330834-002D, HSG, LWR RCTN CHMBR, ENH |
| 262 | 716-011563-261, PLATE, WAFER CLAMP |
SS10962-1-CN
