Equipment parts service

Description

Valid: These are only for end users in USA and Canada. They are subject to prior sale without notice.

Our partner has been working on AMAT Lam used equipment (Etch, CVD,PVD,RTP), spare parts (Brooks Mag7 & PRI Robot, AMAT VHP/HP & P5000 Robot, Rorze, AMAT & LAM PCB  etc) and professional field service.

Main Customers: TSMC, UMC, Global Foundry, SSMC,MEMC, VIS, BPIL, Micron, MIXC, EPISIL, ST etc.

Main Products:

1. AMAT CVD – Chemical Vapor Deposition: The turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT CVD systems.Platform: Producer GT / Producer SE / Producer S / Producer / Centura / P5000;Chamber: Twin chamber / Ultima X / Ultima+ / Ultima / CxZ / DxZ / WxZ;Application: HDPCVD / PECVD / SACVD / WCVD;Wafer size: 300mm / 200mm / 150mm.
2. LAM (NOVELLUS) CVD – Chemical Vapor Deposition:The turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for LAM (Novellus) CVD systems. Platform: Concept 1 / Concept 2;Chamber : Vector / Sequel express / Sequel / Speed / Altus;Application: HDPCVD / PECVD / WCVD;Wafer size: 300mm / 200mm.
3. PVD – Physical Vapor Deposition:The turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT PVD systems.Platform: AMAT Endura;Application: AlCu / IMP / TxZ / TxZ+ / PCII;Wafer size: 300mm / 200mm / 150mm.
4. RTP – Rapid Thermal Processing: The turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT RTP systems.Application: RTP / HTF / SiNgen / EPI;Wafer size: 300mm / 200mm
5. CMP – Chemical Mechanical Polishing: The turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT CMP systems & DNS scrubbers.Platform: Reflexion / MirraMesa / Mirra / Mirra on track;Application: Oxide / Tungsten;Wafer size : 300mm / 200mm.
6. AMAT ETCH – Etching: The turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for AMAT Dry ETCH systems . Platform: Centura AP / Centura 4.0 / Centura II / Centura I;Chamber: DPS II / DPS / Super E /eMxP+ / MxP+ / MxP / eMAX;Application: Poly / Metal / Oxide etch;Wafer size : 300mm / 200mm / 150mm.
7. LAM ETCH – Etching: The turnkey solution, including tool refurbishment, relocation, retrofits, startup, & professional technical service, for Lam Reseah Dry ETCH systems. Platform: Lam Alliance A6 / A4 / 9400 / 9100 / 9600;Lam Rainbow 4420 / 4520 / 4720; Wafer size : 200mm.
8. EDTCU module overhaul ;Producer VHP Robot Armset_Lightweight;Producer retrofit for transparent wafer ;Nikon NWL860 Wafer Loader Retrofit;Narrow body LL slide out sensor retrofit;Magnet overhaul Overhauled Model Type:0010-21810;0010-20768;0100-20328;0010-21844;0010-20225;U05; AMAT wide body loadlock refreshment & overhaul;CMP head parts clean & overhaul;Coolant Sensor Kit Design/upgrade,Flow Sensor,Improvement of ETCH Process Yield:Real time on-line control and alarm,Data collection for process analysis,Variable solution for customer’s requirement;ASP Chamber lift step-less cylinder control system,ASP Chamber lift:ASP Chamber lift assembly to air cylinder.New design for substituted of OEM750 system. New design is compatible for AMAT P/N: 0190-40248.The system is limited that the position error is about 100um standard deviation at various pressure;PhotonControl FluoTemp repair,Repaired Model Type:FGA-0181A (AMAT);FGA-0182B (AMAT);FGA-0173A (AMAT);FGA-0175A (AMAT);FGA-0047A (AMAT);ASY-0007D (AMAT);FGA-0172A (Lam);Crunch prevention Buffer Lid :Detect wafer at safe clearance from slit closing position at wafer edge.Small detection beam.Adjustable detection position.Visible 655nm class 1 laser reflection type sensor for easy positioning.Slit will not close once wafer out of position after LL or process chambers.Able to detect dark dummy wafer for ETCH WAC process;0010-08185, 0100-20068,Orienter LASER OPTICS and CCD Board for SiC Wafer, AMAT.The CCD board and the laser tube are new designs for the SiC and Si wafer. The new product is fully compatible with 6-inch and 8-inch AMAT equipment. It solves the unstable problem of the old system. The new design has been optimized the design for SiC wafers, and it’s to ensure the stability of the production line. The product has been verified on customers;
9. PCB,SBC V452 BOARD 0090-03467、0090-76133、0090-04116);PUMP,EDWARDS DRY PUMP(IQDP40);DRY PUMP,KASHIYAMA (SD90V3+KMB02);DRY PUMP,KASHIYAMA (SD90V3+KMB01);AMAT 0010-47763 , 300 mm ESC;LAM 839-800327-423 , 300 mm ESC;The replacement of AMAT endpoint PC CPU board, 0660-01106/ 0660-01821+0660-0161;DC POWER SUPPLY(3152410-100)(MDX-L12M);CHILLER,SMC CHILLER (INR-496-003D);LPI2200 SMIF;G12 TIN PROCESS KIT W/O COVER RING;PUMP,EBARA ESR200WN;PUMP,EBARA EST200WN.
10. Repair Key Parts: Robot Overhaul/Repair – P5000 ROBOT;Robot Overhaul/Repair – BROOKS MAG7;PCB Repair – AMAT P5000 BOARD;Robot Overhaul/Repair – BROOKS ATR8;Robot Overhaul/Repair – BROOKS MTR-5;Robot Overhaul/Repair – AMAT VHP ROBOT;Robot Overhaul/Repair – AMAT HP MOTOR;Robot Overhaul/Repair – KAWASAKI 3NS410B ROBOT;Robot Overhaul/Repair – Yaskawa XU-RCM6841 Robot;Robot Overhaul/Repair – PRI ROBOT;Robot Overhaul/Repair – RORZE ROBOT;SEZ 2500S;CONTROLLER COMPAX 3012457;300 mm LAM SEZ spindle repair;Parts Repair – ENDPOINT MODULE;Parts Repair – LAM VCE ASSY;Parts Repair – SMIF INDEXER2200;Parts Repair – SLIT VALVE;Parts Repair – LOAD LOCK INDEXER ASSY;PCB Repair – AMAT CENTURA BOARD;PCB Repair – ASYST BOARD.

Please contact us if you are interested in these products, service.

The trademarks of the equipment and parts contained in this website belong to the Original Equipment Manufacturers/Refurbisher.

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