Description
AMAT Equipment Parts Service
Valid Term: These are subject to prior sale. These are only for end user. Appreciate your time.
Location: Asia-SS7381-R-20250120
Semiconductor Equipment (In stock Link):
HOT: 300MM CENTURA DPS System ; 300MM CENTURA EMAX CT+ System ; Endura 5500 System
- Endura 5500 System
• Endura 5500 PVD System, 200MM Endura 5500 PVD System, Process Conversion : AL / Ti / TiN / TiW, Retrofit & Addition : Preclean II & Degas
• Endura 5500 CVD System
• System Refurbishment & Recondition; • System Relocation; • Process Conversion; • Chamber Addition; • System Retrofit - Centura 5200 System
• Centura 5200 ETCH System, 200MM Centura 5200 Etch System
• Centura 5200 RTP System
• Cenlura 5200 DPS System, 300MM Centura DPS II POLY MINOS System ( 1. Centura DPS II EFEM; 2. Centura DPS II EFEM; 3. Cassette; 4. AC Rack; 5. Chamber 1; 6. Chamber 2; 7. Chamber 3; 8. Chamber 4; 9. Misc.); 300MM Centura DPS II POLY MESA System ( 1. Centura EFEM; 2. Centura Transfer; 4. AC Rack; 5. Chamber 1; 6. Chamber 2; 7. Chamber 3; 8. Chamber 4; 9. Misc.) 300MM Centura EMAX CT+ SYSTEM.
• Centura 5200 CVD System , 200MM Centura 5200 CVD System
• Centura 5200 HDP System
• System Refurbishment & Recondition; • System Relocation; • Process Conversion; • Chamber Addition; • System Retrofit - Producer 300mm System
• STD & Shrink System
• Producer CVD System
• System Refurbishment & Recondition; • System Relocation; • Process Conversion; • Chamber Addition; • System Retrofit - Precision 5000 System
• Precision 5000 CVD System, 200MM Precision 5000 CVD
• Precision 5000 ETCH Sys1em, 200MM Precision 5000 Etch
• System Refurbishment & Recondition; • System Relocation; • Process Conversion; • Chamber Addition; • System Retrofit
Key Components:
- IMP Chamber Assembly
• Manufacture : AMAT
• Model : Vectra IMP Chamber
• Wafer Size : 6inch or 8inch
• Wide Body Chamber
• G 12 Source Assembly
• B101 Heater
• Top Match & Bias Match
• 3 Position Gate Valve
• 3 ph Cryo Pump
• Bl 01 Motorized Lift
• 6 inch or 8 inch IMP Process Kit - Loadlock Chamber Assembly
•Manufacture : AMAT
• Model : Widebody Loadlock
• Wafer Size : 6inch or 8inch
• Indexer Assembly
• Automated Cassette Handler
• Loadlock Sensor Assembly
• Cassette Present Assembly
• ENP Cylinder Assembly
• Loadlock Door Cover - Hot AL Chamber Assembly
• Manufacture : AMAT
• Model : HTHU Chamber
• Wafer Size : 6inch or 8inch
• Water Cooled Chamber
• 12.9inch Source Assembly
• HTHU Heater
• 3 Position Gate Valve
• 3 ph Cryo Pump
• Cryo Elbow Assembly
• HTHU Motorized Lilt
• 6inch or 8inch HTHU Process Kit - Preclean Chamber Assembly
• Manufacture : AMAT
• Model : PC II Chamber
• Wafer Size : 6inch or 8inch
• Tur1lo Pump Assembly
• AF Match Assembly
• Pedestal Lift Assembly
• Resonator Assembly
• Vacuum Tube Assembly
• 6inch or 8inch Process Kit
• Base Lilt Assembly
• Cable Assembly - Orienter Degas Chamber Assembly
• Manufacture : AMAT
• Model : Orienter Degas Chamber
• Water Size : 6inch or 8inch
• Standard Body
• Standard Degas Assembly
• Laser CC D Assembly
• TC Sensor Assembly
• Rotation Assembly
• Gimbal Lift Assembly
• Wafer Orienter PCB
• Interlace Cable - Other Chamber Assembly
Dura TTN Chamber Assembly TxZ Chamber Assembly
DxZ Chamber Assembly
MxP Chamber Assembly
CVD Chamber Assembly
Cooldown Chamber Assembly
MxP+ Chamber Assembly
Semiconductor Equipment Parts ( Link1 and Link2 for inventory List):
HOT: 300mm PRODUCER GT Chamber; 300mm ENDURA II Chamber; 300mm ENDURA CL Chamber; 300mm CENTURA II DPS Chamber; 200mm Ori/Degas Chamber; 200mm Preclean Chamber; PVD Heaters & Magnets; Source Assembly & Matcher; Generator Etc..
- Chamber : Various types of chambers, including process chambers, orienter chambers, preclean chambers, load lock chambers, and Degas chambers, are supplied. 300MM ENDURA II PCXT Chamber; 300MM ENDURA CL Chamber; (1. 300MM ENDURA CL PVD Chamber; 2. 300MM ENDURA CL TI Chamber; 3. 300MM ENDURA CL SIP Chamber; 4. 300MM ENDURA CL SIP Chamber; 5. 300MM ENDURA CL AXZ Chamber; 6. 300MM ENDURA CL ALD Chamber; 7. 300MM ENDURA CL Preclean Chamber; 8. 300MM ENDURA EFEM;. 300MM CENTURA AP MINOS Chamber;300MM CENTURA AP MINOS Chamber;
- Generator : Supply of various types of generators including AE (Advanced Energy) generators. Comdel, Astex.,ENI, MKS, etc.
- Robot : Supply of various types of robots and controllers Including AMAT transfer robots, Brooks robots, Kawasaki robots, JEL,
TAZMO, etc. - Pump : Supply of various types of pumps including dry pumps, turbo pumps, water pumps, cryo pumps, etc.
- RPS(Remote Plasma Source) : Supply of various types of RPS used to remove contaminants in the chamber
- RF Match : Supply of various types of match, such as top match, bias match, DTCU. network match, etc. used in the process chamber
- Magnet : Supply of various types of magnets used in the source assembly of semiconductor equipment
- Valve : Supply of various valves to maintain the vacuum state of semiconductor equipment
- Heater : Supply of heaters to control the temperature in the process chamber
- Chiller, heat exchanger, compressor : Supply of various products such as Chiller, Heat exchanger, Compressor of semiconductor equipment
- Board : Supply of various types of boards used in semiconductor equipment
- Source and lead : Semiconductor equipment source and lead supply
- Process kit : Supplied process kits configured to enable processing in the process chamber
- Cable : Supply of cables used for the interface of semiconductor equipment
- Processed parts : Supply of processed parts that make up semiconductor equipment
- Others : Supply of other components used in semiconductor equipment
Industrial Equipment Parts:
- Supply of drivers that control motors in industrial equipment
- Supply of motors that play a driving role in industrial equipment
- Supply of controllers that control in industrial equipment
- Supply of industrial measuring instruments
- Supply of industrial touch screens
- Industrial PLC (Programmable Logic Controller) supply
- Supply of parts for sensors, gauges, and mini-controllers used in industrial equipment
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
