Description
We can supply many configurations of the Endura 5500, Centura 5200 / 5300 and P5000. System mainframe types are: RTP (Rapid Thermal Process), DCVD (Dielectric CVD), WCVD (Tungsten CVD), Tungsten Etch Back and Dielectric Etch. This also includes configuring your system to your specific wafer size with a variety of options
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P5000 Processes
- CVD Processes
- Etch Processes
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P5000 Chambers
- Lamp Heated
- xZ heated
- MxP /MxP+
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P5000 System Option
- Specific Wafer Size Configuration
- Clear Wafer Setup
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SS6688W