Description
AMAT 200MM Endura 5500 PVD
Location: FOX-SS7381-20250117
Info on the system for your reference:
- Vintage: 1992
- Wafersize: 200mm (8 inch)
- Missing Parts : None
- Chamber 1: Tin 101 wide body with shutter
- Chamber 2: AlCu
- Chamber 3: AlCu
- Chamber 4: Tin 101 wide body with shutter
- Chamber 5 : pastewafer
- Chamber A: pre-clean
- Chamber D : degasCryo pump cti
- Cryo compressors: 8510, 9600, 9600
Valid: These are only for end users in USA and Canada. They are subject to prior sale without notice.
The trademarks of the equipment and parts contained on this page belong to the Original Equipment Manufacturers.
SS7381
