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Lam Chamber Parts

Description

Pls tell us PN, Description ,Quantity, and photos if possible. We will provide quotation accordingly. Appreciate your time. These are only for end users.

Our partner in USA is a leading supplier of second source parts for Etch and CVD wafer-processing machines. The company manufactures high-tolerance parts to meet the needs of the semiconductor industry, and is a major supplier of parts to leading FABs in USA.

LAM Research 713-018426-369 Insert, Vespel Ring
LAM Research 713-028487-001 Confindment Vespel Ring
LAM Research 715-011531-014 Electrode 8″, 4400
LAM Research 715-011531-015 Electrode 6″ 4400
LAM Research 715-011531-102 Electrode 6″ 4400
LAM Research 715-011640-005 Focus Ring 4″
LAM Research 715-011640-006 Focus Ring 6″, Rainbow
LAM Research 715-011673-105 Lower Electrode 5″,
LAM Research 715-011746-141 Plate Wafer Clamp 4″
LAM Research 715-011746-151 Plate Wafer Clamp 5″
LAM Research 715-011746-161 Plate Wafer Clamp 6″
LAM Research 715-018991-206 Electrode Upper 6″ 4400
LAM Research 715-018991-208 Electrode Upper 8″ 4400
LAM Research 715-018991-006 Electrode Upper 8″ 4400
LAM Research 715-028087-005 Shroud 6″ 2 mil hard
LAM Research 715-028559-001 Showerhead 6″
LAM Research 715-028606-161 Wafer Clamp 6″
LAM Research 715-030320-001 BSR Injection Ring
LAM Research 715-28608-161 Non-Contact Wafer Clamp
LAM Research 715-31752-206 Electrode Lower 6″
LAM Research 715-31752-208 Electrode Lower 8″
LAM Research 715-330000-090 Gas Injection Ring 9600
LAM Research 715-007469-002 Lower Electrode 6″, 4 pin AUTO ETCH
LAM Research 715-330135-001 BSR Injection Ring 9600
LAM Research 715-330984-001 BSR Injection Ring 9600
LAM Research 715-330987-001 BSR Injection Ring 9600
LAM Research 715-11986-108 Lower Elctrode
LAM Research 715-008721-001 Electrode 6″ 490
LAM Research 715-011531-008 Electrode 6″ 4400
LAM Research 715-011531-009 Electrode 8″ 4400
LAM Research 715-011531-012 Electrode
LAM Research 715-007469-001 Lower Electrode 6″, 4 pin AUTO ETCH
LAM Research 715-007469-102 Lower Electrode 6″, 4 pin AUTO ETCH
LAM Research 715-007025-001 Electrode AUTO ETCH

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