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OEMs: AG Associates
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CHA
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SemiStar Corp. Semiconductor Equipment Parts Service

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TEL

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Used Semiconductor Equipment

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Used Semiconductor Equipment

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AMAT APPLIED MATERIALS TEL Ceramic Heater

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Used Semiconductor Equipment

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AMAT TEL Novellus Varian Ceramic Heaters, MCA E-Chuck Assy

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Tel P 8 XL Fully Automatic Wafer Prober

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Semiconductor Equipment Spare Parts

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Used Semiconductor Equipment

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SIC BOAT SIC VERT BOAT 200mm,NT-UC-B09626

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SIC BOAT SIC VERT BOAT UB06045

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TOKYO ELECTRON LTD (TEL) T.U.681

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Sic Liner 1105-200431-12 TEL

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Used Semiconductor Equipment

Used Semiconductor Equipment

AMAT APPLIED MATERIALS TEL Ceramic Heater

Used Semiconductor Equipment

AMAT TEL Novellus Varian Ceramic Heaters, MCA E-Chuck Assy

Tel P 8 XL Fully Automatic Wafer Prober

Semiconductor Equipment Spare Parts

Used Semiconductor Equipment

SIC BOAT SIC VERT BOAT 200mm,NT-UC-B09626

SIC BOAT SIC VERT BOAT UB06045

TOKYO ELECTRON LTD (TEL) T.U.681

Sic Liner 1105-200431-12 TEL