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SemiStar Corp. Semiconductor Equipment Parts Service

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Semitool

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Semitool EQ626PRCUPLTNG200

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1600-55M

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ST 270S

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Marteq (Verteq) Superclean 1600

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Semitool 440S SRD

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SEMITOOL RCMS-20-1-120

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Semitool Paragon ECD Plating System

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Semitool Paragon Cu/Au Plating System

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STI Semitool ST-860

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OEM Group Spin Rinse Dryer SRD 470 Semitool

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Semitool, SRD, Spinner Rinser Dryer

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SEMILTOOL ST-860

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

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Semitool EQ626PRCUPLTNG200

1600-55M

ST 270S

Marteq (Verteq) Superclean 1600

Semitool 440S SRD

SEMITOOL RCMS-20-1-120

Semitool Paragon ECD Plating System

Semitool Paragon Cu/Au Plating System

STI Semitool ST-860

OEM Group Spin Rinse Dryer SRD 470 Semitool

Semitool, SRD, Spinner Rinser Dryer

SEMILTOOL ST-860