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SemiStar Corp. Semiconductor Equipment Parts Service

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LAM 4520XL

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Pfeiffer Vacuum Classic 590

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Oxford Instruments Plasmalab 800 Plus PECVD

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PE-25

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TEGAL 965 915 PLASMA Etcher ASHER

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Veeco Instruments Dektak 3030 Profiler

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Semiconductor equipment parts

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Grohmann Laser Marking System

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LEYBOLD / BALZERS CORONA

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Leybold OPTICS H3200

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Leybold Optics Dis 2000

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Semiconductor equipment parts

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

LAM 4520XL

Pfeiffer Vacuum Classic 590

Oxford Instruments Plasmalab 800 Plus PECVD

PE-25

TEGAL 965 915 PLASMA Etcher ASHER

Veeco Instruments Dektak 3030 Profiler

Semiconductor equipment parts

Grohmann Laser Marking System

LEYBOLD / BALZERS CORONA

Leybold OPTICS H3200

Leybold Optics Dis 2000

Semiconductor equipment parts