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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
Electroglas
F.E.I.
Gasonics
Glow-Research
HP Agilent
Hitachi
KLA-Tencor
Lam Research
Matrix
MRC
NanoMaster
Oxford
Perkin-Elmer
PlasmaTherm
Premtek
STS SPTS
Tegal
Temescal
TES
Tystar
USIC -Wafers
Pumps
Chillers
Si Wafer Carriers

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SemiStar Corp. Semiconductor Equipment Parts Service

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PCB BOARD IN STOCK

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UV-600

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RTP-800S

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MODULAR One

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Electroglas 4085x prober

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281-7310 Perkin Elmer Ultek LN2 Feedthrough

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220-961-200 Feed through Perkin Elmer Ultek

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Perkin Elmer Ultek High Throughput Ion Pump 221-377-800

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Measurement Samples

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NanoX-2000 Software

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NanoX-2000 Parameters

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NanoX-2000 Applications

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

PCB BOARD IN STOCK

UV-600

RTP-800S

MODULAR One

Electroglas 4085x prober

281-7310 Perkin Elmer Ultek LN2 Feedthrough

220-961-200 Feed through Perkin Elmer Ultek

Perkin Elmer Ultek High Throughput Ion Pump 221-377-800

Measurement Samples

NanoX-2000 Software

NanoX-2000 Parameters

NanoX-2000 Applications