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SemiStar Corp. Semiconductor Equipment Parts Service

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PlasmaQuest RIE

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SPI Plasma Prep II Plasma Cleaning, Plasma Etching

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Axcelis Gemini 2 Chamber 200 mm

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ULVAC PHOENIX

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Oxford Instruments Plasmalab 800 Plus RIE

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Oxford Plasmalab 300 RIE

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Oxford Instruments Plasmalab 80 Plus Reactive Ion Etch RIE System

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Nanospec 4000

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STS multiplex RIE

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Heatpulse 610

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STS / CPX Pegasus Etcher SPTS Pegasus DRIE

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STS Multiplex ICP Bosch Process-8 inch

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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PlasmaQuest RIE

SPI Plasma Prep II Plasma Cleaning, Plasma Etching

Axcelis Gemini 2 Chamber 200 mm

ULVAC PHOENIX

Oxford Instruments Plasmalab 800 Plus RIE

Oxford Plasmalab 300 RIE

Oxford Instruments Plasmalab 80 Plus Reactive Ion Etch RIE System

Nanospec 4000

STS multiplex RIE

Heatpulse 610

STS / CPX Pegasus Etcher SPTS Pegasus DRIE

STS Multiplex ICP Bosch Process-8 inch