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OEMs: AG Associates
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SemiStar Corp. Semiconductor Equipment Parts Service

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Semitool 880-S Spin Rinse Dryer (SRD), PSC 101 Controllers

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DBM2406-V2

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AP-300

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HITACHI 3-850697-01 RF BIAS GENERATOR, 800KHZ, UHF

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TLC GLASS SCRIBER PHOENIX 600

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MKS ENI NOVA50 , NOVA-50A-04 NOVA-50A-10 RF GENERATOR

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Applied Materials 0190-43241 RF GENERATOR, 13.56 MHZ, 5KW OUTPUT

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Axcelis Gemini 2

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0010-23066

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ZYGO NEWVIEW 7300

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AMAT EPI SICONI

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Used Semiconductor Equipment

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Semitool 880-S Spin Rinse Dryer (SRD), PSC 101 Controllers

DBM2406-V2

AP-300

HITACHI 3-850697-01 RF BIAS GENERATOR, 800KHZ, UHF

TLC GLASS SCRIBER PHOENIX 600

MKS ENI NOVA50 , NOVA-50A-04 NOVA-50A-10 RF GENERATOR

Applied Materials 0190-43241 RF GENERATOR, 13.56 MHZ, 5KW OUTPUT

Axcelis Gemini 2

0010-23066

ZYGO NEWVIEW 7300

AMAT EPI SICONI

Used Semiconductor Equipment