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OEMs: AG Associates
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CHA
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SemiStar Corp. Semiconductor Equipment Parts Service

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Sale!
150mm SiC boat
~~$3,500.00~~ $2,500.00
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boats Crucible

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Quartz Wafer Carrier

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ASM 1068-785-01 TRAY WAFER SILICON CARBIDE

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silicon carbide intermediate carrier

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Lam Research Ceramic Quartz Spare parts

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AMAT Ceramic Quartz

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CANON BT-05-01-0003 58-MA-2251-B

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PN 100-01389 SIC CVD COATED PLATE

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CHEMTRACE 81067A Ring

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Pedestal GP12040-C02 0704-8973 UB12510

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Bruce BDF 41 Intermediate carrier

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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150mm SiC boat

boats Crucible

Quartz Wafer Carrier

ASM 1068-785-01 TRAY WAFER SILICON CARBIDE

silicon carbide intermediate carrier

Lam Research Ceramic Quartz Spare parts

AMAT Ceramic Quartz

CANON BT-05-01-0003 58-MA-2251-B

PN 100-01389 SIC CVD COATED PLATE

CHEMTRACE 81067A Ring

Pedestal GP12040-C02 0704-8973 UB12510

Bruce BDF 41 Intermediate carrier