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OEMs: AG Associates
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SemiStar Corp. Semiconductor Equipment Parts Service

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PVD

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Ulvac Ceraus ZX-1000 Sputtering System

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Ulvac Ceraus ZX-1000

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Balzer BAS 450 DM

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Temescal VES 2550 Electron Beam Evaporator with IBAD

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Semicore SC1526

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Roth & Rau SiNA

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LEYBOLD / BALZERS CORONA Sputtering system

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MRC 693 PVD Metal and PVD oxide

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Ulvac XeF2

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Oerlikon Balzers INUBIA B6

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CHA Mark 50 Evaporator

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Anatech Hummer VI

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

Ulvac Ceraus ZX-1000 Sputtering System

Ulvac Ceraus ZX-1000

Balzer BAS 450 DM

Temescal VES 2550 Electron Beam Evaporator with IBAD

Semicore SC1526

Roth & Rau SiNA

LEYBOLD / BALZERS CORONA Sputtering system

MRC 693 PVD Metal and PVD oxide

Ulvac XeF2

Oerlikon Balzers INUBIA B6

CHA Mark 50 Evaporator

Anatech Hummer VI