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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
Electroglas
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Glow-Research
HP Agilent
Hitachi
KLA-Tencor
Lam Research
Matrix
MRC
NanoMaster
Oxford
Perkin-Elmer
PlasmaTherm
Premtek
STS SPTS
Tegal
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USIC -Wafers
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SemiStar Corp. Semiconductor Equipment Parts Service

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Asher

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Gasonic IPC Asher 2000LL 8″ wafer

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Semiconductor Equipment

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Cleaning Systems Semiconductor Equipment

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Glen Technologies (Yield Engineering) R3A

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Nanomaster SWC4000 mask cleaner

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March PX500 plasma asher with ENI 600w Rf generator

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Glen Technologies R3A

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PVA TePla Plasma

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PLASMA TECHNICS INC

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Lam Research SFPD-101 LAM Continuum

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Gasonics Parts

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Branson/IPC Parts

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

Gasonic IPC Asher 2000LL 8″ wafer

Semiconductor Equipment

Cleaning Systems Semiconductor Equipment

Glen Technologies (Yield Engineering) R3A

Nanomaster SWC4000 mask cleaner

March PX500 plasma asher with ENI 600w Rf generator

Glen Technologies R3A

PVA TePla Plasma

PLASMA TECHNICS INC

Lam Research SFPD-101 LAM Continuum

Gasonics Parts

Branson/IPC Parts