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SemiStar Corp. Semiconductor Equipment Parts Service

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Metrology Probe

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2008 Panalytical Xray XRD X’Pert Pro.

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NOVELLUS MB2 PVD SYSTEM

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KLA-Tencor Candela CS 900 Surface Analyzer

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UVOCS Ozone Systems

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Electroglas EG2001X

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Electroglas EG2001x

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Semitool EQ626PRCUPLTNG200

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FEI SIRION SEM

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FEI Quanta 3D FEG Dualbeam

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PHILIPS FEI QUANTA 200

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HITACHI Tabletop Microscope TM3000

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1830 Amray

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

2008 Panalytical Xray XRD X’Pert Pro.

NOVELLUS MB2 PVD SYSTEM

KLA-Tencor Candela CS 900 Surface Analyzer

UVOCS Ozone Systems

Electroglas EG2001X

Electroglas EG2001x

Semitool EQ626PRCUPLTNG200

FEI SIRION SEM

FEI Quanta 3D FEG Dualbeam

PHILIPS FEI QUANTA 200

HITACHI Tabletop Microscope TM3000

1830 Amray