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OEMs: AG Associates
Branson/IPC
Brooks Equipe PRI
CHA
Ekrubnano
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NanoMaster
Oxford
Perkin-Elmer
PlasmaTherm
Premtek
STS SPTS
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TES
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SemiStar Corp. Semiconductor Equipment Parts Service

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3TA HMDS vapor prime oven

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YES-58D HMDS reversal

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Yield Engineering PB12-2P-6P

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Yield Engineering 450PB6-2P

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MRL Industries Bandit 218

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Centrotherm Photovoltaics oxidation

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ENDURA CL SIP CHAMBER

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AMAT Spare Parts ID-7381

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AMAT Endura 5500 PVD

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Nikon Nexiv VMZ-R6555

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TEL Clean Track ACT-8

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KLA-Tencor Spectra CD XT

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We have recently acquired the following equipment from a 4-inch GaAs Fab in the USA: 8 sets of Lam AutoEtch 490 plasma etchers; 5 sets of Matrix 105 plasma asher/descum systems; 4 sets of AG Heatpulse RTP systems (models 4100 and 8108).

Main New Equipment & Parts Service

Vacuum Rapid Thermal Processors
Furnace :Atmosphere CVD/ PLCVD
Plasma Asher / Descum
Plasma Etch /RIE/ ICP/ DRIE/ PEALE
- Ion Beam Milling
Atomic Layer Deposition -ALD/PEALD
- Hybrid Systems
PECVD / Microwave PECVD
MOCVD, PA-MOCVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Optical Coating System
Wet & Dry Cleaning, Reticle/Mask Cleaning
Space Simulation & Metrology Instruments
Accessories, Spare Parts & Service

Main Refurbished Equipment and Accessories

Rapid Thermal Processors
Plasma Asher /Descum
Plasma Etchers
Plasma Etch/ RIE/ ICP/ DRIE
ALD PECVD CVD
Sputtering Deposition
E-Beam & Thermal Evaporator
Metrology Instruments
Wafer Probes
SEM FEG
Tester
Mask Aligner
Robot Controller Aligner Accessories
Vacuum Pumps /Compressor Accessories
Chillers Accessories

Main Rapid Thermal Processors

Rapid Thermal Processors

The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers

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Navigation

3TA HMDS vapor prime oven

YES-58D HMDS reversal

Yield Engineering PB12-2P-6P

Yield Engineering 450PB6-2P

MRL Industries Bandit 218

Centrotherm Photovoltaics oxidation

ENDURA CL SIP CHAMBER

AMAT Spare Parts ID-7381

AMAT Endura 5500 PVD

Nikon Nexiv VMZ-R6555

TEL Clean Track ACT-8

KLA-Tencor Spectra CD XT