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LAM 490B AutoEtch 490
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Veeco Optical Profiler
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Nanometrics NanoSpec 8300X
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Jeol JWS-7700 Wafer Inspection
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CVD Equipment RTP system
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Philips Ruby, Ellipsometer
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FEI Philips XL-30 ESEM
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Perkin Elmer 4450 Sputtering
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IPEC Avanti 372M CMP
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MRL Horizontal furnace
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AMAT P5000 CVD DXZ
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Carl Zeiss AIMS 193
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