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OXFORD Plasmalab 100 ICP
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Lam Rainbow 4420 Poly
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TEL ELECTRON MARK 7
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MRC 943 sputtering system
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MMR Technologies Hall effect
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THERMA-WAVE TP 630XP
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KLA-Tencor P 10 Profiler
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KLA Tencor P 17 Profiler
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Advanced Oxide Etcher
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8″ KLA / TENCOR ECD-2
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KLA-Tencor Surfscan 6420
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8 sets of Gasonics L3510
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