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Archive | New ALD Equipment

Deposition of SiO2, ALD SAMPLE DATA

Atomic layer deposition (ALD) is an important technique for depositing thin films for a variety of applications. ALD provides precise thickness control and conformal deposition for high aspect ra-tio applications, exceeding the level of other deposition methods. The sequential, self-limiting surface reactions in ALD produce a non-statistical deposition as precursor flux randomness is a non-factor. […]

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Deposition of AlN, ALD SAMPLE DATA

Atomic layer deposition (ALD) is an important technique for depositing thin films for a variety of applications. ALD provides precise thickness control and conformal deposition for high aspect ra-tio applications, exceeding the level of other deposition methods. The sequential, self-limiting surface reactions in ALD produce a non-statistical deposition as precursor flux randomness is a non-factor. […]

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Deposition of GaN, ALD SAMPLE DATA

Atomic layer deposition (ALD) is an important technique for depositing thin films for a variety of applications. ALD provides precise thickness control and conformal deposition for high aspect ra-tio applications, exceeding the level of other deposition methods. The sequential, self-limiting surface reactions in ALD produce a non-statistical deposition as precursor flux randomness is a non-factor. […]

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Deposition of Al2O3 ,ALD SAMPLE DATA

Atomic layer deposition (ALD) is an important technique for depositing thin films for a variety of applications. ALD provides precise thickness control and conformal deposition for high aspect ra-tio applications, exceeding the level of other deposition methods. The sequential, self-limiting surface reactions in ALD produce a non-statistical deposition as precursor flux randomness is a non-factor. […]

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