Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR Tystar products are primarily used in the semiconductor industry. The semiconductor manufacturing and process technology has in recent years successfully penetrated other applications such as solar PV (photovoltaic) […]
Archive | Furnace LPCVD
LPCVD Processes
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR LPCVD refers to a thermal process used to deposit thin films from gas-phase precursors at subatmospheric pressures. Process conditions are typically selected so that the growth rate is […]
Atmospheric Processes
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR TYTAN Furnace systems can be used for all conventional atmospheric pressure processes employed in the semiconductor industry. Processes run at temperatures above 1150°C require a thicker wall quartz […]
TYTAN Reactor Processes
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR Process technology has become a very important aspect of semiconductor fabrication equipment. Semiconductor manufacturers require from the equipment supplier not only process recipes for their processes, but in […]
