Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR Wet oxidation is used for growing thicker (> 100 nm) layers of silicon dioxide for applications such as isolation (field oxides and local oxidation) and dopant diffusion barriers, […]
Archive | Furnace LPCVD
Silicon Dioxide Resonators
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR TYTAN oxidation systems have been used to prepare oxide films needed to fabricate high-Q optical resonators. A world record of Q value close to one billion has been […]
Silicon Carbide Devices
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR Silicon Carbide Oxidation Most wide bandgap materials are difficult to oxidize thermally. Luckily, SiC is an exception, which can be oxidized into SiO2 thermally. This enables us to borrow […]
NANOWIRE CVD
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR Tystar reactor systems are excellent tools for use in the study of future nanowire possibilities. Tystar has been working closely with universities for many years and offers the […]
CARBON NANOTUBES
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR Tystar introduces a family of equipment for the fabrication of Carbon Nano Tubes (CNT) and Nano Wires. The CNT equipment can be used for both CNT research and […]
OPTICAL DEVICES
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR Tystar furnace systems are ideal for the processing of thick SiO2 films (>15 µm) with excellent optical properties for the manufacturing of optical waveguide products, which is one of […]
Modified Chemical Vapor Deposition (MCVD)
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR There are a few manufacturing steps to the production of optical fibers. Modified Chemical Vapor Deposition (MCVD) is the very first step that involves torch heating and chemical […]
MEMS FABRICATION
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR MEMS Devices (Micro-Electro-Mechanical Systems) have found over the last decade a major interest for a variety of applications. MEMS devices incorporate micron-sized mechanical elements, such as sensors and […]
SOLAR CELL MANUFACTURING
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR Since solar cells are semiconductor devices, the solar manufacturing processes is not much different form the semiconductor device fabrication process. A new development in the industry is that […]
SEMICONDUCTOR DEVICE MANUFACTURING
Tystar Equipment: MINI SERIES | STANDARD SERIES | NANO SEREIS | SOLAR SERIES | Photo-Enhanced CVD | Tystar Instruments: GAS CONTROL| MASS FLOW TESTER | FLOW CALIBRATOR Tystar is not a mere supplier of semiconductor equipment but also of process technology and technical support. Our technical service for a process unit lasts for as long […]