Description
Varian EHPi-500 Ion Implant System
The items are subject to prior sale without notice. These items are only for end users. The trade mark belongs to Varian.
Condition: Used. We could not test it We sell it at AS IS WHERE IS.
Equipment ID:
(1)ID-OEM-5.
(2)ID-SS5816W
Varian E 500 EHPI Ion Implant System, 6″
– Power: 208 V,50/60 Hz, 3 Phase
– CE Mark
– Connection: Top
– Source 1: IHC
– IHC Arc PS
– IHC Filament PS
– IHC Bias PS
– Extraction Electrode: EHP
– Bushing: EHP
– Extraction PS
– Source Magnet Polarity Switch
Gas Box:
– String #1 SDS
– String #2 SDS
– String #3 SDS
– String #4 HP
Beamline:
– Two Step Reducer
– Gauss Meter
– Terminal Pneumatics
– Auto Decel
– Total Beamenergy Probe
– Mirror PS
– Scan Amplifier
– Setup Cup Amplifier
End Station:
– Chuck system: ESC
– Dose Integrator
– DI Temp Monitor Controller
– Uniformity Controller
– Platen Tilt Servo Controller
– Scanning Faraday Controller
– Right Elevator Controller
– Left Elevator Controller
– Orienter Controller
– Uniformormity Controller
– Gauge Controller
– Right Arm Controller
– Left Arm Controller
– Scanning Faraday/Rotating Platen Controller
– Endstation Pneumatic Interface
– Right Handler Pneumatic Interface
– Left Handler Pneumatic Interface
– Linear Motor Servo Controller
Control System:
– Computer: Win7
– Software: V15.10.12
– Light Tower
High Vac Pumps
– Source Turbo: Pfeiffer
– Analyzer Turbo: Pfeiffer
– Scanner Turbo: Pfeiffer
– Endstation Cryo
– LoadLock right: Cryo
– LoadLock left: Cryo
Dry Roughing Pumps
– Source/Terminal: Edwards Setup
– Differential Seal: Busch Scroll Fossa 15
– End station / Load Lock: Edwards Setup
Remote Facility Rack
– Cryo Comp: 9700A
– Motor Alternator
– DI Waterpump
