Description
Please contact us if you are interested in the South Bay Tech RIE-2000 . The South Bay Tech RIE-2000 is only for end users and are subject to prior sale without notice. Appreciate your time.
The SouthBay reactive ion etcher is for anisotropic etching. It is a capacitive coupled parallel plate plasma reactor and equipped with 200W RF generator, manual matching network, 6″ sample stage, and turbo pump. Available etching gases with this tool include SF6, CF4, CHF3, O2, and Ar.
South Bay Tech RIE-2000 can be used to etch Si, SiO2, Si3N4, W, Ti, and other substrate materials.
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