Description
Used Semiconductor Equipment Parts-Packaging and Miscellaneous
Valid: Subject to prior payment/sale without notice. This is only for end users. Appreciate your time!
The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers.
| Gasonic AE1000/AE2001 | |
| P/N | Description |
| 90-2572 Rev.B | controller pcb |
| A06-001-01 | vented window Qtz |
| A06-005-01 | showerhead Qtz |
| A06-010-01 | Qtz |
| A78-034-01 | 0.987×0.103 |
| A78-054-01 | 0.862×0.103 |
| A78-057-01 | 8.234×0.139 |
| A78-094-01 | |
| AS-568A-159 | 4.987×0.13 |
| BF-0412-DP | Bimba cylinder |
| BF-019.5-D | Bimba cylinder |
| BF-122-DP | Bimba cylinder |
| W28-X01A-12 | 32Vdc, 12A fuse |
| Equipment: LAM | |
| Part # | Description |
| 415-00035-001 | ENT Arm 6″ |
| 415-00036-001 | EXT Arm 6″ |
| 515-11835-001 | Tool Height 6mm, Rev.D |
| 713-011574-001 | Plunger wafer lamp |
| 713-018426-369 | Insert, Vespel Ring |
| 713-028485-001 | bolt electrode ring clamp KELF |
| 713-028487-001 | Ring Confiment (Vespel) |
| 715-000067-R001 | Gear Mod, SM |
| 715-000103-R001 | Gear Mod, LG |
| 715-005115-001 | cooling ring 8″ electrode |
| 715-006160-001 | Pivot Arm |
| 715-006310-001 | Spacer |
| 715-006973-001 | EQ holder, wafer 6″ ENT |
| 715-007469-002 | Electrode, LWR. 8″, 4 pin |
| 715-008369-001 | Lifter wafer 4 pin |
| 715-008721-001 | Electrode 6″ |
| 715-009853-001 | lifter |
| 715-011531-008 | Electrode 6″ |
| 715-011531-009 | Electrode 8″ |
| 715-011531-014 | Electrode 8″, |
| 715-011531-015 | Electrode 6″ |
| 715-011531-102 | Electrode 6″ |
| 715-011640-005 | Focus Ring 4″ |
| 715-011640-006 | Focus Ring 6″, Rainbow |
| 715-011665-004-U | cap lower electrode, 4″ w/vent groove |
| 715-011665-114-U | cap lower electrode, 4″ w/grv |
| 715-011673-105 | Lower Electrode 5″, |
| 715-011746-141 | Plate Wafer Clamp 4″ |
| 715-011746-151 | Plate Wafer Clamp 5″ |
| 715-011746-161 | Plate Wafer Clamp 6″ |
| 715-018641-106 | lower electrode, 4″ w/vent groove |
| 715-018991-006 | Electrode Upper 8″ |
| 715-018991-206 | Electrode Upper 6″ |
| 715-018991-208 | Electrode Upper 8″ |
| 715-028087-005 | Shroud 6″ 2 mil hard |
| 715-028559-001 | Showerhead 6″ |
| 715-028606-161 | Wafer Clamp 6″ |
| 715-030320-001 | BSR Injection Ring |
| 715-006973-001 | EQ holder, wafer 6″ ENT |
| 715-11986-108 | Lower Electrode |
| 715-28608-161 | Non-Contact Wafer Clamp |
| 715-31752-206 | Electrode Lower 6″ |
| 715-31752-208 | Electrode Lower 8″ |
| 715-330000-090 | Gas Injection Ring |
| 715-330135-001 | BSR Injection Ring |
| 715-330984-001 | BSR Injection Ring |
| 715-330987-001 | BSR Injection Ring |
| 716-006446-001 | diffuser cathode |
| 716-006711-001 | showerhead, graphite oxide |
| 716-006711-002-U | 5.50″ SFG2, upper electrode |
| 716-006721-001 | Ring, insulation |
| 716-331100-001 | R. Edge 6″ ESC, Fl Bot. CER |
| 775-009685-001 | Filter for M&W |
| 810-08566-001 | PCB Motor Drive |
| 814-012525-001 | Assy. Lifter/Spinner |
| 853-005684-001 | Assy. Recipe Module |
| 853-012525-001 | Assy. Lifter/Spinner |
| 853-4073-X | Hine Design indexer |
| 856-07278-001 | Actuator and Guides |
| Hine Design indexer, pc board | |
| MFC, UFC 1000A, 100 sccm He | |
| MFC, UFC 1200A, 200 sccm He | |
| MFC, UFC 1200A, 200 sccm SF6 | |
| MFC, UFC 1100, 50 sccm O2 | |
| MFC, UFC 1200A, 200 sccm CHF3 | |
| MFC, UFC 1100A, 200 sccm CF4 | |
| MFC, UFC 1200A, 5 slm N2 | |
| UPC, 1300, 100 sccm He | |
| MFC, FC 260, 2 slm N2 | |
| MFC, UFC 1200A, 200 sccm He | |
| AC-2 Controller Tylan General, auto-etch | |
| Light Pen for Rainbow | |
| LAM Auto etch CRT monitor |
SS6188-S-1W3 20241121
