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Used equipment parts

Used equipment parts

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Please contact us if you are interested in the following items . These items are only for end users and are subject to prior sale without notice. Appreciate your time.

1 Carl Zeiss AIMS 193 Mask Qualification System w/Coherent LDU ESI 500Hz FT 193nm
2 Novellus C1 Concept One Oxide CVD tool, 2 RF Generator TEOS gas cabinet complete
3 Novellus C1 Concept One #3 Oxide CVD tool Robot 2 RF Generator TEOS complete
4 Mattson Aspen III, Front End Transfer chamber, Robot, Controller,
5 AMAT Applied Materials Precision 5000 Nitride PARC PECVD System P5000
6 DNS Screen DNS 80A Developer track tool, Developer Photoresist Chemical Cabinet
7 Plasmatherm SL-730 PECVD equipment, SL730 CVD processing tool
8 Rudolph FE-3 Focus ellipsometer8″ capable
9 Hitachi M-308ATE, metal etch system w power rack, Delatech scrubber gas cabinet
10 Semiconductor Diagnostics SDI 210, 210E-SPV, FAaST, Wafer Measurement
11 Fusion Semiconductor G03 Ozone Asher. Dual chamber, Dual robot arm
12 ZYGO KMS450i inspection system, looks complete, with controller 060-00010-01
13 KLA Tencor 5107 Overlay Inspection System, KLA 5100 series
14 Used Fusion Semiconductor G03 Ozone Asher. Dual chamber, Dual robot arm
15 Leica DM4000 M w/ Noran Vantage DAQ, Spectra physics VSL 337 NDS-61 Laser
16 Mitutoyo Ultraplan FS110, Technical Instrument Company K2IND/MIT, Fcs Finder II
17 Chamber Wide Body PVD, Shell, 0040-20195, Endura, IMP
18 AMAT 0010-22037 G12 Source Assy w/ Side Cooling, 0040-23104/ 0020-20149
19 THERMO SCIENTIFIC NICOLET 6700 FT-IR SPECTROMETER, MAP300 and Wafer stage
20 2 Sumitomo SU-01C72 Aviza 815008-one generating unit
21 AMAT Centura DPS Dome Temperature Controller DTCU 0060-35211 0060-35210
22 AMAT 0010-38755 Centura DPS Dome Temperature Controller 0060-35212 DTCU
23 GaSonics 9104 Quartz Chamber Plasma Asher 15698-02, ENI OEM-12B-06 RF Generator
24 Ultratech Stepper Model 2700, used for Parts
25 Karl Suss MA 200 Litho Mask Aligner 200mm wafer 210AA057-03, Suss Microtec
26 AR World Wide KAW6042M1 Modular RF System 47-63MHZ , Amplifier, Combiner
27 Semitool SST408 Solvent Chemical Stripping Resist Remover Tool, SST, 6″
28 J-MAR Precision Systems 3012-05 Automated Microscope w/ Large XY Stage
29 ZYGO KMS450i inspection system, parts tool, with controller 060-00010-01 #1118
30 Brooks 002-9510-155, Automation Kit, Robot Atr8, 2 Foup Novellus 04-172106-00
31 AMAT 0010-39337 Assy, Motor Driver Drawer
32 AMAT 673029 w Heater Platen Assy, Assembly, Infrared Quartz Heater 12,800 Watts
33 Brooks Automation 002-9520-155 Kit, Robot, Atr8, 2 Foup ANL, SST 04-172106-00
34 PWS P5MS, Pacific Western Systems Wafer Prober, Probe Controller II, 20
35 Nanometrics 8300X Film Thickness Analyzer, Wafer, 7000-0519, 7200-2161
36 Kulicke & Soffa KNS BOSS 20000 Interface Test System BBT20000, chip set tester
37 AMAT 0190-77363 Module, Brush Liquid Delivery, Low Flow
38 AMAT 0040-18024 E-Chuck, 200mm, MKA, SNNF, CVD ceramic coated
39 Novellus 63-303438-00 Robot Assy, DU EE, NO EE, 200, Brooks 002-7090-10
40 MTM Engineering Engenuity systems MT 288 outgas analysis system w MKS RGA
41 MTM Engineering Engenuity systems MT-288 #SPC108 outgas analysis tool w MKS RGA
42 AMAT 0040-01761 Endura Pre-clean Chamber Body, Sputter, PVD
43 3 A30W Ebara mechanical vacuum pumps, extra control box, 3 sets power cables
44 2 AMAT 0010-20422 PVD Endura 8 inch shield Treatment, G12 LID,
45 2 AMAT 0010-70403 PVD Endura G-12 AFS LID, G12
46 AMAT 9010-00672 Left + Right Exchange Arm Assy, Quantum Leap Process, 1080-00099
47 Edwards B74956000 Model STP 1000L Turbo Pump, STP H1000
48 Brooks automation 143668 Robot, with dual Robot Blade, M phase 978-262-2900
49 AMAT 0010-01994 Rev.001, Magnet Assembly, PVD, Endura, Sputter Chamber.
50 Modutek 6′ WPS Wet Processing Bench, Station, C14506-9500, C14506-8000, PVDF
51 Semitool SSTF42120F Solvent Chemical Stripping Resist Remover Tool, SST, 6 inch
52 MKS ASTRONhf-s AX7645PS/01 Remote Plasma RF Generator, 200-208V, 60A
53 Kensington Newport WH4, Robot assembly WFH4Cm.TT/LR 04-6288-01-08 EMP
54 Gasonic IPC Asher 2000LL Plasma Asher Etch System cassette to Cassette Automatic
55 Condition is unknown and we sell as is, No Warranty
56 Wentworth Lab 0-043-0001 Prober, Lamp, 8″ Wafer Chuck Temptronic TP03000A-2300-1
57 Lot of 2, AMAT 0040-33499, 300mm Preheat Degas module, looks unused,
58 AMAT 0010-37176 ESC Assembly, Chuck, 300 MM , DPS AE Etch Chamber
59 3 A30W Ebara mechanical vacuum pumps, 1 w/exhaust gas dilution, water cooled
60 Watkins Johnson WJ 906464-001 Muffle Etch, Convey Belt
61 APPLIED MATERIALS, AMAT 0010-21668 PVD magnet. New
62 AMAT 3920-00249 Sensor Dry Nova, Xenon Illumination 510-20000-03 Assy
63 AMAT 9010-00505 Blade Drive Assembly +/-15
64 AMAT 0010-21668, Magnet assy, PVD, very clean, looks new or rebuilt
65 Asyst WX 73 Wafer Mapper, Hine Design HA4 Robot 0400-088, Robot Assembly 402438
66 Asyst WX 73 Wafer Mapper, Hine Design HA4 Robot 0400-088, Robot Assembly 402439
67 AMAT 0010-21810 Magnet Assy, G-12, Encapsulated Durasource G Type:
68 Mactronix LBJ600P5, MGI 4 Rail QB (52 Slots), Wafer Cassette Loader 402440
69 Mactronix LTP650P5 QB (52 Slots), Wafer Cassette Loader 402441
70 PWS P5MS, Pacific Western Systems Wafer Prober Assy, Probe II, 20, Controller
71 Ransco Despatch Fast Rate Cycling Chamber Oven with LN2 low pressure injection
72 Ransco Fast Rate Cycling Oven with LN2 low pressure injection Despatch chamber
73 NOVELLUS 15-138597-00, HPD Speed Process Chamber
74 11 AMAT 0010-40099 ETO RF Matching Network Erhorn price for all 11
75 2 SULLAIR SV-10 Facility Vacuum system controller assembly, RSVS150 AC, Piping
76 SpeedFam 2805-103891 Assembly, Platen Spindle Cooled Polisher
77 IPEC SpeedFam Novellus 2805-103891 Assy, Platen Spindle Cooled Polisher
78 KLA Tencor 750-370919-001 300UV Robot Arm Box w/ Plate, 750-059525-000
79 Novellus R02-300, Ion Source Match Network
80 AMAT 0010-21810 Magnet Assembly, G-12, Encapsulated, Durasource
81 AMAT 0010-21810 Magnet Assembly, G-12, Encapsulated, Durasource
82 Agilent 86100A Wide-Bandwith Oscilloscope w/ 86113A DCA Optical Module
83 Zygo KMS400 Mask Inspection Microscope, Objective, Technical Instrument K2 CD II
84 Leybold 400110V0017 Turbovac Turbo Pump, MAG W 1300 C, AMAT 3620-00304
85 Brooks Automation 002-7090-10, AquaTran 7 Wafer Transfer Robot, ATRY.
86 Brooks Automation 002-7090-10, AquaTran 7 Wafer Transfer Robot, ATRY.
87 Cymer S04-09075-11 Laser Stabilization Module
88 Alcatel ATH 1000 M Turbo Pump w/ Alcatel ACT 1000 M Controller
89 AMAT 0010-39736 Lid Assy Clamp, 0021-03277, 0040-39619
90 AMAT 0040-61366 Metal Etch Chamber, DI Seal, Edge Gas, MXP+, Mark II
91 AMAT 0010-92209 Gas Module, SDS, Unit (8160MFC) N20 5 SCCM
92 AMAT 0010-40280 Roof Top, Sub-Assembly, CGF, DOS, Lid, Cover, 0190-4017
93 Tegal source reactor ICP CR1350-00300 with Tegal MHZ controller CR1325-00400
94 Brooks 002-7090-14CUR Robot with 101376 Controller, I/O Assembly 002-4674-09
95 Phillips Asembleon PA130800 Eclipse Fine Pitch Placement system 2 heads 6500 /hr
96 Brooks Automation 002-7090-10 AquaTran 7 Robot, Novellus
97 CSZ Cincinnati Sub-Zero Temperature Environmental Chamber ZHS-8-1-1-H/AC
98 AMAT 0090-90862 Advance Hivolt
99 Ipitek Lumitherm LT2000-110-8, 03-3077-0001, AMAT 0190-35780 Control FBR-OPT
100 AMAT 0100-35050 Backplane PCB assembly, Centura Controller I/O PCBA, 0130-35050
101 AMAT 0190-16013 Exhaust Switching Unit TEC-05 Kit 1 & 2, ESC-C2-5-X7
102 Kernco Instruments Wafer Contact angle goniometer Tool for Surface Tension
103 Phoenix x-ray systems FRIE0001-10105, Friedemann 180KV x-ray generator
104 AMAT 0040-09723 Unibody, Etch Chamber w/ .397 Step, Poly Trench
105 ANELVA Rotary Magnetron assy.
106 Advanced Energy 3150073-001 AE RF-10S, RF Generator, 1000W Novellus G19-10071-00
107 AMAT 0040-18024, E-CHUCK, 200MM, MKA, SNNF, CVD
108 Genmark GB8-MT-98030074 Robot Wafer Assy, MGC 2234-MB3320 Motor Encoder
109 AMAT 9010-00739 Focus Clamping Box Assy, 9010-00739ITL, 0090-91422ITL
110 AMAT 0010-37163 Throttle Valve Assy, 2 Phase, DPS Chamber, 329914
111 AMAT 0010-37163 Throttle Valve Assy, 2 Phase, DPS Chamber, 329915
112 AMAT 0010-37163 Throttle Valve Assy, 2 Phase, DPS Chamber
113 AMAT 0190-22090 Wafer Loader Orienter w/ Rorze D-Sub End Coupler
114 AMAT 0010-20030 Wafer Orienter Lift Assy w/ Chamber Lid, Notch Finder
115 Daihen SGM-15B SMA-15B AMAT 0010-30397 1.5kW Microwave magnetron, guides, tuner
116 Daihen SGM-15B SMA-15B AMAT 0010-30397 1.5kW Microwave magnetron,AMAT 0920-01044
117 AMAT 0220-21314, Preclean Chamber, D&H-SIN 014.
118 AMAT 0010-12123 Assy PLC Controller 200MM Wald CH. A OR
119 Asyst Alignment Calibration Fixture w/ Gauges, 1000-0719-01 1000-0715-01
120 JEOL JSM-6400 F SEM, scanning electron microscope
121 AMAT 0010-00383 125MM INDEXER ASSY, EASE
122 AMAT 0010-70166, Assembly 15 Slot Storage Elevator, 5000 Cleanroom.
123 AMAT 0010-03530 Assembly, Diamond Head Carrier
124 AMAT 0010-03530 Assy, Diamond C Head Carrier, ASM, 2492-038
125 2 AMAT 0010-03559 Heater Assembly
126 AMAT 0010-70166, Assembly 15 Slot Storage Elevator, 5000 Cleanroom.
127 AMAT 0010-03530 Diamond C Head Carrier Assy
128 AMAT 0190-21122 Cobalt MZ Endura Target, 06-08132-00, 20-472D-C0000-1​003
129 Delta Design Summit ATC 1909177 P&P Handler & Affinity PWG-060K-BE44CB​D2
130 Delta Design Summit ATC 1909177 P&P Handler w/ Affinity PWG-060K-BE44CB​D2
131 Delta Design Summit ATC 1909177 P&P Handler w/ Affinity PWG-060K-BE44CB​D2
132 Delta Design Summit ATC 1909177 P&P Handler w/ Affinity PWG-060K-BE44CB​D2
133 CANON Y60-1113-000 401458 Lens Unit zoom expander, surplus part
134 AMAT 0010-40245 Lift Assy, All E Chuck Chamber Omega
135 Brooks Automation Used Robot 121669
136 AMAT 0040-31780 Base, Cooling 200MM Cathode, DPS MEC, Base Plate 5200,
137 CTI Helix Brooks Cryo pump, 8116013G005 on-board 10, FastRegen Control 810
138 Watkins Johnson 7376-001, WJ wafer loader return shuttle, WJ999 or WJ1000,
139 AMAT Endura PVD Pre Clean Chamber Base Assembly RF match, Lift Chuck
140 New Advanced Energy PDX 8000 3156048-200 sn721874 AE PDX-8000 RF Generator
141 AMAT 0240-31726 USG PLIS Pallet w/ Valves and Injectors, Weldment, CH
142 ZYGO KMS450i tower controller 291-00033-AD, parts tool, missing hard drive
143 KLA Tencor P11 surface profiler, part tool, no PC with glass stage
144 Brooks Automation, 001-2300-45, Buffer Robot Transfer Cluster Chamber
145 Delta Design Summit ATC 1909177 P&P Handler & Affinity PWG-060K-BE44CB​D2

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The trademarks of the equipment and parts contained in this website belonged to the Original Equipment Manufacturers