Description
TRIKON / ELECTROTECH Delta 201 CVD System
ID: OEM-5
Info on the system from OEM files.
- TRIKON / ELECTROTECH Delta 201 CVD System, 6″
- Thin film deposition with silicon dioxide and silicon nitride
- Thin film uniformity: >6%
- Thin film thickness: 1000 Å to 1 micron
- Silane and N2O for SiO2
- Silane, Ammonia and Nitrogen for SiNx.
SS5487