Main Maker

Tepla 300 Autoload PC Microwave Plasma Asher

Description

Tepla 300 Autoload PC Microwave Plasma Asher

Microwave plasma batch system for resist stripping and wafer cleaning
 
200mm wafer capability
 
PC controller
 
Batch size: 50 wafers per load
 
Ceramic chamber: 9.6″ diameter x 15″ deep
 
Microwave frequency 2.45GHz
 
maximum power 1000 watts
 
2 process gas channels
 
capacitance manometer MKS Baratron
 
software: manual and automatic operation, graphical display
 
Temperature control: IR thermometer
 
Optical end point detector
 
230v, 50/60hz, single phase, 16 amps, 2KW
 
CE Certified
 
Plasma time: 974.03 hours
 
Mactronix LTP-650E Automatic cassette loader
 
Vacuum pump not included: specify oil rotary or dry pump

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