Description
Tepla 300 Autoload PC Microwave Plasma Asher
Microwave plasma batch system for resist stripping and wafer cleaning
200mm wafer capability
PC controller
Batch size: 50 wafers per load
Ceramic chamber: 9.6″ diameter x 15″ deep
Microwave frequency 2.45GHz
maximum power 1000 watts
2 process gas channels
capacitance manometer MKS Baratron
software: manual and automatic operation, graphical display
Temperature control: IR thermometer
Optical end point detector
230v, 50/60hz, single phase, 16 amps, 2KW
CE Certified
Plasma time: 974.03 hours
Mactronix LTP-650E Automatic cassette loader
Vacuum pump not included: specify oil rotary or dry pump
SS172828781639
