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2016

Tegal Spare Parts

Please contact us for the Tegal Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.

Category: Parts

Description

Description

Please contact us for the Tegal Spare Parts availability of the following parts. Please include the P/N, Description, Quantity and photos if possible.

37-221-001	Tegal 1903E	Upper Electrode
37-221-003	Tegal 1903E	Upper Electrode
40-788-616	Tegal 901E	Centering ESC 6″ Bnded Genhre
39-680-003	TSI-TG80003	Electrode Conehead
40-140-001		RING INSUL CER
40-140-003		RING INSUL CER 99.5
40-395-001		RING, FLAT 6″ CERAMIC
40-395-001		RING 6″ CASTELLATED W/ FLAT CUTAWAY
40-395-002		Ring, Ceramic, 125C, Castellated
40-395-003		RING 4″ CASTELLATED W/ FLAT CUTAWAY
40-575-003-C		Ring, Ceramic Nest, Flat Ring
40-576-003-C		Ring Ceramic Focus, Castellated
39-344-002	Tegal 901	Shower Head
40-395-001
40-788-616
40-869-002
80-202-357	O-Ring	O-Ring
37-222-002		Cooling Plate (Not cost efective.)
39-733-004		901e Lower Electrode
39-735-003		903e Lower Electrode
39-735-004		903e Lower Electrode
39-741-009		903e Lower Electrode
39-741-010		903e Lower Electrode
39-741-026		903e Lower Electrode
39-927-007		903e Lower Electrode
39-927-008		903e Lower Electrode
40-260-001		Window Sapphire
40-826-001	Quartz	Shield Ion Stripper Quartz
19684-2		Washer Spacer .56 OD x .19 ID
37-221-002	Tegal 1903E	Upper Electrode
40-140-003	Ceramic	Ring Insulator Ceramic
40-516-005		Ring Macor RAD Comp 4′ T/16XX
39-735-002		903e Lower Electrode
39-741-002		Lower Electrode Anodized
39-927-022		903e Lower Electrode 6″-Flat-Ano
40-822-002	Tegal	Focus Ring Quartz Tegal

Recommended Hot Equipment

Metrology | Tester | Wafer Carriers
Main Refurbished Equipment

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