Description
Please contact us if you are interested in the SUSS MA6 Mask Aligner. The SUSS MA6 Mask Aligner is only for end users and are subject to prior sale without notice. Appreciate your time.
The SUSS MA6 Mask Aligner is the highest resolution contact mask aligner available , with sub-micron feature capability in positive tone resists. In addition to the highly accurate topside alignment capability, the MA6 can perform front-to-backside alignment with the use of a second alignment microscope.
Major functions, features, and benefits:
*Topside(TSA) and Backside(BSA) alignment
*Achievable exposure resolution 0.6 um, alignment resolution better than 1um
*Maximum substrate size 6″
*Able to perform soft, hard, low vacuum and vacuum contact, as well as proximity exposure
*Restricted to positive-tone photoresists
*Minimum alignment mark separation for binocular vision: 5 cm
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