Description
We provide professional repair service of your Brooks/PRI/Equipe robots, robot controllers, pre-aligners, and Neslab’s water recirculators, chillers, and VXI’s lamp power modules(LPM, LAMP PWR CNTL MODULE) for AG Associates Heatpulse 4100, Heatpulse 4108, Heatpulse 8108, heatpulse 8800 Rapid Thermal Processing Equipment, Rapid Thermal Processors, Rapid Thermal Annealing systems..
These services are only for end users. The services are subject to our engineer’s schedule. Please contact us for the available.
Brooks Pre-Aligner
- 001-0080-10
- 001-0080-09
- 1008-07
- 4900-0006-089
- 4900-0006-079
- AG Associates Part Number: 4900-0006-07 / 4900-0006-08 ( Identical except switch # 2 setting on DIP switch on main board. Being in ON position, the aligner will work in parallel mode which is used on AG 4100 tools. Being in OFF position, it will work in serial mode which is used on AG 8100 and 8800 and the parallel board gets disabled and not used at all), 4900-0006-25 (an upgrade to save the LEDs life. The LED come ON only when wafer is aligning)
- Replacement of fork pads for Brooks Pre-Aligner.
Brooks/PRI/Equipe Pre-Alinger PRE series
- PRE-100
- PRE-200
- PRE-201
- PRE-300
- PRE-301
Brooks/PRI/Equipe Robot Controllers
- ESC-100
- ESC-200
- ESC-212
- ESC-204
- ESC-208
- Spare PCB at new condition:
| P/N | Description | |||
| 2002-0088 | CPU Board w/ NVSRAM and software | |||
| 2002-0089 | Galil 3 Axis Motion Control Board, fem | |||
| 2002-0064 | I/O Control Board for Robot | |||
| 2002-0066 | I/O Control Board for Pre aligner | |||
| 2006-1053 | Amplifier Board for Robot, male. | |||
| 2006-1054 | Amplifier Board for Pre-Aligner, male | |||
| 2006-1057 | Amplifier Board for Pre-Aligner, fem. | |||
Brooks/PRI/Equipe Robots
- ATM-104
- ATM-105
- ATM-107
- ATM-205
- ATM-207
- ATM-305
- ATM-307
- ATM-405
- ATM-407
- Replacement Belt Of DFACT 112
- Replacement of Equipe 2-02-1022 2-02-1021 cable
VXI/Celestica LAMP PWR CNTL MODULE ,Lamp Power Module (LPM)
- 7100-5705-089
- 7100-5705-08
-
7100-5705-04
- 7100-6159-05
- 7100-6159-01
- 4000-1044-06
- 4000-1044-079
-
4000-1044-07
Thermo Scietific/Neslab Chillers Water Recirculators/Heat Exchangers
- System I
- System II
- Thermo Scietific/Neslab Systems I
- Thermo Scietific/Neslab Systems II
- M and W Heat Exchangers
- Neslab’s RTE series : Neslab RTE 1034A, Neslab RTE 211, Neslab RTE 201 etc.
All the Heatpulse Rapid Thermal Processing , Rapid Thermal Annealing equipment trademarks belongs to AG Associates , the original equipment manufacturer. The photo at this page is only for your reference. All rights reserved.
We also have the following robots, controllers and pre-aligners (ID SS380EBJOY-KR2014). Please contact us for the availability. They are subject to prior sale.
| 1 |
BROOKS AUTOMATION PRE-ALIGNER P/N 002-7391-08 / GOOD CONDITION |
| 2 |
BROOKS AUTOMATION RELIANCE ATR ROBOT & CONTROLLER SET P/N 017-0266-01 / WORKING |
| 3 |
BROOKS AUTOMATION TECHWARE 5 EXPRESS CONTROLLER |
| 4 |
BROOKS Magna Tran7 300mm WAFER TRANSFER ROBOT ARM SET P/N 002-0016-34 |
| 5 |
BROOKS,PRI,EQUIPE ABM 205-1-S-CE PRI ROBOT / TESTED / GOOD CONDITION / WORKING |
| 6 |
BROOKS,PRI,EQUIPE ABM 407-1-S-CE-Z1 ROBOT / TESTED / GOOD CONDITION / WORKING |
| 7 |
BROOKS,PRI,EQUIPE ATM 407B-2-S-CE ROBOT / TESTED / GOOD CONDITION / WORKING |
| 8 |
BROOKS,PRI,EQUIPE ATM 407C-2-S-CE-S293 ROBOT / TESTED / GOOD CONDITION / WORKING |
| 9 |
BROOKS,PRI,EQUIPE PRE-300B-CE ALIGNER / TESTED / GOOD CONDITION / WORKING |
| 10 |
BROOKS,PRI,EQUIPE ROBOT CONTROLLER ESC-212B / TESTED / GOOD CONDITION / WORKING |
| 11 |
BROOKS,PRI,EQUIPE VAC-407 ROBOT / TESTED / GOOD CONDITION / WORKING |
| 12 |
EQUIPE,PRI,BROOKS PRE-050B-CE ALIGNER / KLA TENCOR / GOOD CONDITION / WORKING |
| 13 |
EQUIPE,PRI,BROOKS PRE-200 200mm ALIGNER BELT, 1SET(5 EA) FOR OVERHAUL OR REPAIR |
| 14 |
EQUIPE,PRI,BROOKS PRE-201 PRI ALIGNER / GOOD CONDITION / WORKING |
| 15 |
EQUIPE,PRI,BROOKS PRE-201B-CE ALIGNER / VEECO / KLA TENCOR / NEW |
| 16 |
EQUIPE,PRI,BROOKS PRE-201-CE PRI ALIGNER / GOOD CONDITION / WORKING |
| 17 |
EQUIPE,PRI,BROOKS PRE-301B-CE ALIGNER / TESTED / GOOD CONDITION / WORKING |
| 18 |
EQUIPE,PRI,BROOKS PRE-301B-L-ST PRI ALIGNER / TESTED / GOOD CONDITION / WORKING |
| 19 |
GENMARK E0220 , Wafer Handling Robot -Good Condition |
| 20 |
Kensington Laboratories DUAL ARM MULTI-LINK Wafer Handling Robot & CONT / NEW |
| 21 |
Kensington Laboratories Robot Controller / GOOD CONDITION |
| 22 |
KENSINGTON LABORATORIES,Wafer Handling Robot , 25-3700-1425-05 / NEW |
| 23 |
MECS ROBOT CONTROLLER CS-7000 FOR ROBOT UTV-F2500H,USED |
| 24 |
MECS ROBOT UTV-F2500H ,CONTROLLER FOR CS-7000 ,USED |
| 25 |
MECS ROBOT UTX-F5000 ,CONTROLLER FOR CS-7000 ,USED |
| 26 |
RORZE RR304L120 ROBOT / TESTED / GOOD CONDITION / WORKING |
| 27 |
RORZE RR304L90 ROBOT / TESTED / GOOD CONDITION / WORKING |
| 28 |
RORZE RR406L300-511-002 ROBOT WITH CONTROLLER & CABLES / USED / GOOD CONDITION |
| 29 |
RORZE RR721L202H-H30-1CA-3 ROBOT AMAT KAPA / NEW / TESTED / WORKING |
SS10338
