Main Maker

Plasmatherm SLR 720 MF RIE Reactive Ion Etch System

Description

Plasmatherm SLR 720 MF RIE Reactive Ion Etch System

PC controller with graphical user interface.

Single chamber unit with load lock.

RF5S 500W, 13.56 MHz RF Generator.

Turbo pump with roughing pump.

Currently configured with four MFC, others may be added at additional price.

208V, 3 Ph, 60 Hz.

 

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