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Plasmatherm RIE Reactive Ion Etching System

Description

Plasmatherm RIE Reactive Ion Etching System

lasmatherm Z80 RIE – Reactive Ion Etching System, Manual Load  – Non-Load Lock, Alcatel turbo with controller, VAT , MKS Throttle Valve and a VAT Gate valve, Ion Gauge Controller, Advanced Energy RF5S – 500W 13.56MHz RF power supply with match work/ tuner for lower electrode.  Upper chamber shower head with a 11″ diameter lower electrode,  DOS operating system.  Currently (4) Four Mass Flow Controllers with N2 purge

System offered operational, no warranty implied.

We also offer System refurbishments with a PC Operating system, installation and training for an additional fee

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