Description
lasmatherm Z80 RIE – Reactive Ion Etching System, Manual Load – Non-Load Lock, Alcatel turbo with controller, VAT , MKS Throttle Valve and a VAT Gate valve, Ion Gauge Controller, Advanced Energy RF5S – 500W 13.56MHz RF power supply with match work/ tuner for lower electrode. Upper chamber shower head with a 11″ diameter lower electrode, DOS operating system. Currently (4) Four Mass Flow Controllers with N2 purge
System offered operational, no warranty implied.
We also offer System refurbishments with a PC Operating system, installation and training for an additional fee
SS181919712380